JPS5429982A - Automatic contour checking device - Google Patents

Automatic contour checking device

Info

Publication number
JPS5429982A
JPS5429982A JP9507377A JP9507377A JPS5429982A JP S5429982 A JPS5429982 A JP S5429982A JP 9507377 A JP9507377 A JP 9507377A JP 9507377 A JP9507377 A JP 9507377A JP S5429982 A JPS5429982 A JP S5429982A
Authority
JP
Japan
Prior art keywords
checking device
automatic contour
contour checking
pattern
automatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9507377A
Other languages
Japanese (ja)
Other versions
JPS59973B2 (en
Inventor
Keiichi Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52095073A priority Critical patent/JPS59973B2/en
Publication of JPS5429982A publication Critical patent/JPS5429982A/en
Publication of JPS59973B2 publication Critical patent/JPS59973B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To check automatically a fine breakaway, contamination and an isolated part inside a pattern when checking the concave two-dimentional pattern with its surface uniform.
COPYRIGHT: (C)1979,JPO&Japio
JP52095073A 1977-08-10 1977-08-10 Automatic visual inspection equipment Expired JPS59973B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52095073A JPS59973B2 (en) 1977-08-10 1977-08-10 Automatic visual inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52095073A JPS59973B2 (en) 1977-08-10 1977-08-10 Automatic visual inspection equipment

Publications (2)

Publication Number Publication Date
JPS5429982A true JPS5429982A (en) 1979-03-06
JPS59973B2 JPS59973B2 (en) 1984-01-10

Family

ID=14127800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52095073A Expired JPS59973B2 (en) 1977-08-10 1977-08-10 Automatic visual inspection equipment

Country Status (1)

Country Link
JP (1) JPS59973B2 (en)

Also Published As

Publication number Publication date
JPS59973B2 (en) 1984-01-10

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