JPS5432271A - Collection and deflection unit of electron beam - Google Patents

Collection and deflection unit of electron beam

Info

Publication number
JPS5432271A
JPS5432271A JP9855877A JP9855877A JPS5432271A JP S5432271 A JPS5432271 A JP S5432271A JP 9855877 A JP9855877 A JP 9855877A JP 9855877 A JP9855877 A JP 9855877A JP S5432271 A JPS5432271 A JP S5432271A
Authority
JP
Japan
Prior art keywords
collection
electron beam
deflection unit
plural number
sequentially
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9855877A
Other languages
Japanese (ja)
Inventor
Hiroshi Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9855877A priority Critical patent/JPS5432271A/en
Publication of JPS5432271A publication Critical patent/JPS5432271A/en
Pending legal-status Critical Current

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  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To enable the radiation to a given region without wafer movement and to perform electron radiation with high accuracy, by arranging a plural number of electron lenses consisting of a plural number of ring conductors duplicately through shifting the center, and by performing the excitation sequentially one by one or sequentially by one group with a given current ratio.
COPYRIGHT: (C)1979,JPO&Japio
JP9855877A 1977-08-17 1977-08-17 Collection and deflection unit of electron beam Pending JPS5432271A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9855877A JPS5432271A (en) 1977-08-17 1977-08-17 Collection and deflection unit of electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9855877A JPS5432271A (en) 1977-08-17 1977-08-17 Collection and deflection unit of electron beam

Publications (1)

Publication Number Publication Date
JPS5432271A true JPS5432271A (en) 1979-03-09

Family

ID=14223012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9855877A Pending JPS5432271A (en) 1977-08-17 1977-08-17 Collection and deflection unit of electron beam

Country Status (1)

Country Link
JP (1) JPS5432271A (en)

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