JPS5432396A - Gas sensitive element - Google Patents
Gas sensitive elementInfo
- Publication number
- JPS5432396A JPS5432396A JP9780277A JP9780277A JPS5432396A JP S5432396 A JPS5432396 A JP S5432396A JP 9780277 A JP9780277 A JP 9780277A JP 9780277 A JP9780277 A JP 9780277A JP S5432396 A JPS5432396 A JP S5432396A
- Authority
- JP
- Japan
- Prior art keywords
- sensitive element
- gas sensitive
- sensitivity
- containing specific
- moo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000035945 sensitivity Effects 0.000 abstract 2
- 230000032683 aging Effects 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 229910052787 antimony Inorganic materials 0.000 abstract 1
- 239000003054 catalyst Substances 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 229910052738 indium Inorganic materials 0.000 abstract 1
- 229910052742 iron Inorganic materials 0.000 abstract 1
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Inorganic materials O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 abstract 1
- 229910052758 niobium Inorganic materials 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- 229910052720 vanadium Inorganic materials 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE: To obtain the element which is superior in sensitivity and gas selectivity, is particularly small in the temperature and humidity coefficients of resistance value and causes less aging by providing a catalyst layer containing specific Bi2O3-MoO3 on the surface of the sensitivity body containing specific amounts of ZnO, Me2O5 and Me2'O3 (where Me is one of V, Nb, Ta, Sb and Me' of Ga, B, In, Fe, Al, Cr).
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9780277A JPS5432396A (en) | 1977-08-17 | 1977-08-17 | Gas sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9780277A JPS5432396A (en) | 1977-08-17 | 1977-08-17 | Gas sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5432396A true JPS5432396A (en) | 1979-03-09 |
| JPS5711426B2 JPS5711426B2 (en) | 1982-03-04 |
Family
ID=14201904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9780277A Granted JPS5432396A (en) | 1977-08-17 | 1977-08-17 | Gas sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5432396A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5846914A (en) * | 1981-09-16 | 1983-03-18 | 松下電器産業株式会社 | electric cooker |
| JPS5910725U (en) * | 1982-07-13 | 1984-01-23 | 日本電熱株式会社 | heat sensitive reactor |
| JPS5932722A (en) * | 1982-08-19 | 1984-02-22 | Matsushita Electric Ind Co Ltd | Thermo-sensitive controller for electric heater |
| US10580628B2 (en) | 2014-08-12 | 2020-03-03 | Lam Research Corporation | Differentially pumped reactive gas injector |
-
1977
- 1977-08-17 JP JP9780277A patent/JPS5432396A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5846914A (en) * | 1981-09-16 | 1983-03-18 | 松下電器産業株式会社 | electric cooker |
| JPS5910725U (en) * | 1982-07-13 | 1984-01-23 | 日本電熱株式会社 | heat sensitive reactor |
| JPS5932722A (en) * | 1982-08-19 | 1984-02-22 | Matsushita Electric Ind Co Ltd | Thermo-sensitive controller for electric heater |
| US10580628B2 (en) | 2014-08-12 | 2020-03-03 | Lam Research Corporation | Differentially pumped reactive gas injector |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5711426B2 (en) | 1982-03-04 |
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