JPS5432438B2 - - Google Patents

Info

Publication number: JPS5432438B2
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP6253173A

Other languages

Japanese (ja)

Other versions

JPS5010787A (cs

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1973-06-05

Filing date

1973-06-05

Publication date

1979-10-15

1973-06-05 Application filed filed Critical

1973-06-05 Priority to JP6253173A priority Critical patent/JPS5432438B2/ja

1975-02-04 Publication of JPS5010787A publication Critical patent/JPS5010787A/ja

1979-10-15 Publication of JPS5432438B2 publication Critical patent/JPS5432438B2/ja

Status Expired legal-status Critical Current

Links

Landscapes

Physical Vapour Deposition (AREA)

JP6253173A 1973-06-05 1973-06-05 Expired JPS5432438B2 (cs)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP6253173A JPS5432438B2 (cs)	1973-06-05	1973-06-05

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP6253173A JPS5432438B2 (cs)	1973-06-05	1973-06-05

Publications (2)

Publication Number	Publication Date
JPS5010787A JPS5010787A (cs)	1975-02-04
JPS5432438B2 true JPS5432438B2 (cs)	1979-10-15

Family

ID=13202864

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP6253173A Expired JPS5432438B2 (cs)	1973-06-05	1973-06-05

Country Status (1)

Country	Link
JP (1)	JPS5432438B2 (cs)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS51137443U (cs) *	1975-04-30	1976-11-06
JPS51142050U (cs) *	1975-05-08	1976-11-16
JPS561724Y2 (cs) *	1975-11-12	1981-01-16
JPS5265184A (en) *	1975-11-26	1977-05-30	Nippon Telegr & Teleph Corp <Ntt>	Eqipment for simultaneous sputtering at both surface
JPS55134175A (en) *	1979-04-06	1980-10-18	Hitachi Ltd	Microwave plasma etching unit
JP2544006Y2 (ja) *	1990-03-09	1997-08-13	セイコー電子工業株式会社	電子時計

1973
- 1973-06-05 JP JP6253173A patent/JPS5432438B2/ja not_active Expired

Also Published As

Publication number	Publication date
JPS5010787A (cs)	1975-02-04

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