JPS5434097A - Manufacture of thin film resistor - Google Patents

Manufacture of thin film resistor

Info

Publication number
JPS5434097A
JPS5434097A JP10010877A JP10010877A JPS5434097A JP S5434097 A JPS5434097 A JP S5434097A JP 10010877 A JP10010877 A JP 10010877A JP 10010877 A JP10010877 A JP 10010877A JP S5434097 A JPS5434097 A JP S5434097A
Authority
JP
Japan
Prior art keywords
thin film
manufacture
film resistor
specific resistance
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10010877A
Other languages
Japanese (ja)
Inventor
Shinji Yoshida
Tatsuo Shirakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10010877A priority Critical patent/JPS5434097A/en
Publication of JPS5434097A publication Critical patent/JPS5434097A/en
Pending legal-status Critical Current

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  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Abstract

PURPOSE: To obtain a stable, high sheet resistance by increasing a specific resistance and sputtering so thick as proportional to the specific resistance of Ta-Al-N system thin film for a hybrid integrated circuit.
COPYRIGHT: (C)1979,JPO&Japio
JP10010877A 1977-08-23 1977-08-23 Manufacture of thin film resistor Pending JPS5434097A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10010877A JPS5434097A (en) 1977-08-23 1977-08-23 Manufacture of thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10010877A JPS5434097A (en) 1977-08-23 1977-08-23 Manufacture of thin film resistor

Publications (1)

Publication Number Publication Date
JPS5434097A true JPS5434097A (en) 1979-03-13

Family

ID=14265174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10010877A Pending JPS5434097A (en) 1977-08-23 1977-08-23 Manufacture of thin film resistor

Country Status (1)

Country Link
JP (1) JPS5434097A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6794753B2 (en) 2002-12-27 2004-09-21 Lexmark International, Inc. Diffusion barrier and method therefor
US7080896B2 (en) 2004-01-20 2006-07-25 Lexmark International, Inc. Micro-fluid ejection device having high resistance heater film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6794753B2 (en) 2002-12-27 2004-09-21 Lexmark International, Inc. Diffusion barrier and method therefor
US7080896B2 (en) 2004-01-20 2006-07-25 Lexmark International, Inc. Micro-fluid ejection device having high resistance heater film

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