JPS543476A - Electron beam exposure device - Google Patents

Electron beam exposure device

Info

Publication number
JPS543476A
JPS543476A JP6812877A JP6812877A JPS543476A JP S543476 A JPS543476 A JP S543476A JP 6812877 A JP6812877 A JP 6812877A JP 6812877 A JP6812877 A JP 6812877A JP S543476 A JPS543476 A JP S543476A
Authority
JP
Japan
Prior art keywords
electron beam
exposure device
beam exposure
cross
provideng
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6812877A
Other languages
Japanese (ja)
Other versions
JPS5415665B2 (en
Inventor
Hidekazu Goto
Takashi Soma
Masanori Idesawa
Nobuo Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
RIKEN
Original Assignee
Jeol Ltd
Nihon Denshi KK
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, RIKEN filed Critical Jeol Ltd
Priority to JP6812877A priority Critical patent/JPS543476A/en
Publication of JPS543476A publication Critical patent/JPS543476A/en
Publication of JPS5415665B2 publication Critical patent/JPS5415665B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To vary the cross-section shape for the electron beam by provideng a deflecting means at the position of the cross-over image which is grown between the first and second slits.
COPYRIGHT: (C)1979,JPO&Japio
JP6812877A 1977-06-09 1977-06-09 Electron beam exposure device Granted JPS543476A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6812877A JPS543476A (en) 1977-06-09 1977-06-09 Electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6812877A JPS543476A (en) 1977-06-09 1977-06-09 Electron beam exposure device

Publications (2)

Publication Number Publication Date
JPS543476A true JPS543476A (en) 1979-01-11
JPS5415665B2 JPS5415665B2 (en) 1979-06-16

Family

ID=13364790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6812877A Granted JPS543476A (en) 1977-06-09 1977-06-09 Electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS543476A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams
JPS53124078A (en) * 1977-02-23 1978-10-30 Ibm Electron beam device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams
JPS53124078A (en) * 1977-02-23 1978-10-30 Ibm Electron beam device

Also Published As

Publication number Publication date
JPS5415665B2 (en) 1979-06-16

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