JPS5435681A - Alignment device - Google Patents

Alignment device

Info

Publication number
JPS5435681A
JPS5435681A JP10238477A JP10238477A JPS5435681A JP S5435681 A JPS5435681 A JP S5435681A JP 10238477 A JP10238477 A JP 10238477A JP 10238477 A JP10238477 A JP 10238477A JP S5435681 A JPS5435681 A JP S5435681A
Authority
JP
Japan
Prior art keywords
alignment device
wafer
mask
adherence
arranging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10238477A
Other languages
Japanese (ja)
Inventor
Shunichi Naka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP10238477A priority Critical patent/JPS5435681A/en
Publication of JPS5435681A publication Critical patent/JPS5435681A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To improve the adherence of water and mask, by arranging the pressure area corresponding to the external form of wafer at both the mask pattern side and the wafer side.
COPYRIGHT: (C)1979,JPO&Japio
JP10238477A 1977-08-24 1977-08-24 Alignment device Pending JPS5435681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10238477A JPS5435681A (en) 1977-08-24 1977-08-24 Alignment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10238477A JPS5435681A (en) 1977-08-24 1977-08-24 Alignment device

Publications (1)

Publication Number Publication Date
JPS5435681A true JPS5435681A (en) 1979-03-15

Family

ID=14325947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10238477A Pending JPS5435681A (en) 1977-08-24 1977-08-24 Alignment device

Country Status (1)

Country Link
JP (1) JPS5435681A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141944U (en) * 1979-03-29 1980-10-11
US5535952A (en) * 1993-08-11 1996-07-16 Tada; Tetsuya Safety mechanism for a manually operated trigger activated dispenser
JP2015038982A (en) * 2013-07-18 2015-02-26 Ｎｓｋテクノロジー株式会社 Holding device and contact exposure device and proximity exposure device of substrate
JP2015038981A (en) * 2013-07-18 2015-02-26 Ｎｓｋテクノロジー株式会社 Contact exposure system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141944U (en) * 1979-03-29 1980-10-11
US5535952A (en) * 1993-08-11 1996-07-16 Tada; Tetsuya Safety mechanism for a manually operated trigger activated dispenser
JP2015038982A (en) * 2013-07-18 2015-02-26 Ｎｓｋテクノロジー株式会社 Holding device and contact exposure device and proximity exposure device of substrate
JP2015038981A (en) * 2013-07-18 2015-02-26 Ｎｓｋテクノロジー株式会社 Contact exposure system

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