JPS5437579A - Chrome plate - Google Patents

Chrome plate

Info

Publication number
JPS5437579A
JPS5437579A JP10447577A JP10447577A JPS5437579A JP S5437579 A JPS5437579 A JP S5437579A JP 10447577 A JP10447577 A JP 10447577A JP 10447577 A JP10447577 A JP 10447577A JP S5437579 A JPS5437579 A JP S5437579A
Authority
JP
Japan
Prior art keywords
chrome plate
chrome
plate
crox
atom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10447577A
Other languages
Japanese (ja)
Inventor
Kyusaku Nishioka
Teruhiko Yamazaki
Jun Uno
Haruyuki Hoshika
Yukimichi Kanedaki
Mitsuru Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10447577A priority Critical patent/JPS5437579A/en
Publication of JPS5437579A publication Critical patent/JPS5437579A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To manufacture a high-precision mask by setting the density of O in CrOx to 0 to 0.01 or 0.1 to 2.5 at an atom-number ratio of O to Cr and by providing a thin film of no oxide to the interface between a Cr film surface and transparent substrate at need.
COPYRIGHT: (C)1979,JPO&Japio
JP10447577A 1977-08-30 1977-08-30 Chrome plate Pending JPS5437579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10447577A JPS5437579A (en) 1977-08-30 1977-08-30 Chrome plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10447577A JPS5437579A (en) 1977-08-30 1977-08-30 Chrome plate

Publications (1)

Publication Number Publication Date
JPS5437579A true JPS5437579A (en) 1979-03-20

Family

ID=14381590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10447577A Pending JPS5437579A (en) 1977-08-30 1977-08-30 Chrome plate

Country Status (1)

Country Link
JP (1) JPS5437579A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018155047A1 (en) * 2017-02-27 2018-08-30 Hoya株式会社 Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
US11119400B2 (en) 2017-04-08 2021-09-14 Hoya Corporation Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018155047A1 (en) * 2017-02-27 2018-08-30 Hoya株式会社 Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
JP2018141969A (en) * 2017-02-27 2018-09-13 Hoya株式会社 Mask blank, transfer mask manufacturing method, and semiconductor device manufacturing method
JP2019012287A (en) * 2017-02-27 2019-01-24 Hoya株式会社 Mask blank, method for manufacturing reflective mask, and method for manufacturing semiconductor device
JP2019200440A (en) * 2017-02-27 2019-11-21 Hoya株式会社 Mask blank and method for manufacturing imprint mold
TWI726192B (en) * 2017-02-27 2021-05-01 日商Ｈｏｙａ股份有限公司 Mask blank, method of manufacturing a transfer mask and method of manufacturing a semiconductor device
US11281089B2 (en) 2017-02-27 2022-03-22 Hoya Corporation Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
US11119400B2 (en) 2017-04-08 2021-09-14 Hoya Corporation Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
US11435662B2 (en) 2017-04-08 2022-09-06 Hoya Corporation Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device

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