JPS5437683A - Unit for oxidation - Google Patents

Unit for oxidation

Info

Publication number
JPS5437683A
JPS5437683A JP10356877A JP10356877A JPS5437683A JP S5437683 A JPS5437683 A JP S5437683A JP 10356877 A JP10356877 A JP 10356877A JP 10356877 A JP10356877 A JP 10356877A JP S5437683 A JPS5437683 A JP S5437683A
Authority
JP
Japan
Prior art keywords
atmosphere
oxidation
unit
oxidized
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10356877A
Other languages
Japanese (ja)
Inventor
Kunihiko Wada
Motoo Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10356877A priority Critical patent/JPS5437683A/en
Publication of JPS5437683A publication Critical patent/JPS5437683A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain the oxide film having uniform thickness and less in dispersion, by constituting the dynamic atmosphere from the oxidizing a atmosphere with mixing, when the Si wafer is oxidized acceleratingly under high pressure oxidized atmosphere and SiO2 film is grown.
COPYRIGHT: (C)1979,JPO&Japio
JP10356877A 1977-08-31 1977-08-31 Unit for oxidation Pending JPS5437683A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10356877A JPS5437683A (en) 1977-08-31 1977-08-31 Unit for oxidation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10356877A JPS5437683A (en) 1977-08-31 1977-08-31 Unit for oxidation

Publications (1)

Publication Number Publication Date
JPS5437683A true JPS5437683A (en) 1979-03-20

Family

ID=14357396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10356877A Pending JPS5437683A (en) 1977-08-31 1977-08-31 Unit for oxidation

Country Status (1)

Country Link
JP (1) JPS5437683A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163931U (en) * 1986-04-09 1987-10-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163931U (en) * 1986-04-09 1987-10-17

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