JPS5438785A - Production of coating film of photoelectric transducers - Google Patents

Production of coating film of photoelectric transducers

Info

Publication number
JPS5438785A
JPS5438785A JP10418477A JP10418477A JPS5438785A JP S5438785 A JPS5438785 A JP S5438785A JP 10418477 A JP10418477 A JP 10418477A JP 10418477 A JP10418477 A JP 10418477A JP S5438785 A JPS5438785 A JP S5438785A
Authority
JP
Japan
Prior art keywords
production
coating film
photoelectric transducers
transducers
photoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10418477A
Other languages
Japanese (ja)
Inventor
Yasuhiro Horiike
Masahiro Shibagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10418477A priority Critical patent/JPS5438785A/en
Publication of JPS5438785A publication Critical patent/JPS5438785A/en
Pending legal-status Critical Current

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Landscapes

  • Light Receiving Elements (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To obtain coating films which are even and have a desired refractive index in a low vacuum by depositing and forming silicon nitride films on photoelectric transducers through chemical reaction.
COPYRIGHT: (C)1979,JPO&Japio
JP10418477A 1977-09-01 1977-09-01 Production of coating film of photoelectric transducers Pending JPS5438785A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10418477A JPS5438785A (en) 1977-09-01 1977-09-01 Production of coating film of photoelectric transducers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10418477A JPS5438785A (en) 1977-09-01 1977-09-01 Production of coating film of photoelectric transducers

Publications (1)

Publication Number Publication Date
JPS5438785A true JPS5438785A (en) 1979-03-23

Family

ID=14373902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10418477A Pending JPS5438785A (en) 1977-09-01 1977-09-01 Production of coating film of photoelectric transducers

Country Status (1)

Country Link
JP (1) JPS5438785A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03250626A (en) * 1990-01-30 1991-11-08 Mitsubishi Electric Corp Forming method for thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03250626A (en) * 1990-01-30 1991-11-08 Mitsubishi Electric Corp Forming method for thin film

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