JPS5440689A - Surface defect detecting method and apparatus of substance - Google Patents

Surface defect detecting method and apparatus of substance

Info

Publication number
JPS5440689A
JPS5440689A JP10714877A JP10714877A JPS5440689A JP S5440689 A JPS5440689 A JP S5440689A JP 10714877 A JP10714877 A JP 10714877A JP 10714877 A JP10714877 A JP 10714877A JP S5440689 A JPS5440689 A JP S5440689A
Authority
JP
Japan
Prior art keywords
substance
detecting method
surface defect
defect detecting
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10714877A
Other languages
Japanese (ja)
Other versions
JPS5842421B2 (en
Inventor
Toshihiko Oomichi
Niei Kino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP10714877A priority Critical patent/JPS5842421B2/en
Publication of JPS5440689A publication Critical patent/JPS5440689A/en
Publication of JPS5842421B2 publication Critical patent/JPS5842421B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP10714877A 1977-09-05 1977-09-05 Method and device for detecting surface defects on objects Expired JPS5842421B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10714877A JPS5842421B2 (en) 1977-09-05 1977-09-05 Method and device for detecting surface defects on objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10714877A JPS5842421B2 (en) 1977-09-05 1977-09-05 Method and device for detecting surface defects on objects

Publications (2)

Publication Number Publication Date
JPS5440689A true JPS5440689A (en) 1979-03-30
JPS5842421B2 JPS5842421B2 (en) 1983-09-20

Family

ID=14451719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10714877A Expired JPS5842421B2 (en) 1977-09-05 1977-09-05 Method and device for detecting surface defects on objects

Country Status (1)

Country Link
JP (1) JPS5842421B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04280402A (en) * 1991-03-07 1992-10-06 Sony Tektronix Corp Tool for adjustment
JP2024503990A (en) * 2020-12-18 2024-01-30 クー．アント ゲー・エム・ベー・ハー Method of calibrating a particle sensor, particle sensor and apparatus having a particle sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04280402A (en) * 1991-03-07 1992-10-06 Sony Tektronix Corp Tool for adjustment
JP2024503990A (en) * 2020-12-18 2024-01-30 クー．アント ゲー・エム・ベー・ハー Method of calibrating a particle sensor, particle sensor and apparatus having a particle sensor
US12553818B2 (en) 2020-12-18 2026-02-17 Q.ant GmbH Method for calibrating a particle sensor, particle sensor, and apparatus having a particle sensor

Also Published As

Publication number Publication date
JPS5842421B2 (en) 1983-09-20

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