JPS5442582B2 - - Google Patents

Info

Publication number
JPS5442582B2
JPS5442582B2 JP9117276A JP9117276A JPS5442582B2 JP S5442582 B2 JPS5442582 B2 JP S5442582B2 JP 9117276 A JP9117276 A JP 9117276A JP 9117276 A JP9117276 A JP 9117276A JP S5442582 B2 JPS5442582 B2 JP S5442582B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9117276A
Other languages
Japanese (ja)
Other versions
JPS5317066A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9117276A priority Critical patent/JPS5317066A/ja
Publication of JPS5317066A publication Critical patent/JPS5317066A/ja
Publication of JPS5442582B2 publication Critical patent/JPS5442582B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Led Devices (AREA)
JP9117276A 1976-07-30 1976-07-30 Vapor phase epitaxial growth method Granted JPS5317066A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9117276A JPS5317066A (en) 1976-07-30 1976-07-30 Vapor phase epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9117276A JPS5317066A (en) 1976-07-30 1976-07-30 Vapor phase epitaxial growth method

Publications (2)

Publication Number Publication Date
JPS5317066A JPS5317066A (en) 1978-02-16
JPS5442582B2 true JPS5442582B2 (2) 1979-12-14

Family

ID=14019038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9117276A Granted JPS5317066A (en) 1976-07-30 1976-07-30 Vapor phase epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS5317066A (2)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2428561A1 (fr) * 1978-06-12 1980-01-11 Shimano Industrial Co Pedalier de bicyclette
JPS5687316A (en) * 1979-12-17 1981-07-15 Matsushita Electric Ind Co Ltd Gaseous phase epitaxial growth device
JPS57198620A (en) * 1981-06-01 1982-12-06 Fujitsu Ltd Vapor growth of compound semiconductor
JPS582294A (ja) * 1981-06-29 1983-01-07 Fujitsu Ltd 気相成長方法
US4645689A (en) * 1984-02-17 1987-02-24 At&T Bell Laboratories Deposition technique
JPS62137821A (ja) * 1985-12-12 1987-06-20 Matsushita Electric Ind Co Ltd 半導体気相成長方法
JPH0373517A (ja) * 1989-08-14 1991-03-28 Nec Corp 半導体光デバイス
JP2553731B2 (ja) * 1990-04-13 1996-11-13 三菱電機株式会社 半導体光素子

Also Published As

Publication number Publication date
JPS5317066A (en) 1978-02-16

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