JPS544571A - Plasma treating apparatus - Google Patents

Plasma treating apparatus

Info

Publication number
JPS544571A
JPS544571A JP7013677A JP7013677A JPS544571A JP S544571 A JPS544571 A JP S544571A JP 7013677 A JP7013677 A JP 7013677A JP 7013677 A JP7013677 A JP 7013677A JP S544571 A JPS544571 A JP S544571A
Authority
JP
Japan
Prior art keywords
treating apparatus
plasma treating
treated
objects
chamber provided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7013677A
Other languages
Japanese (ja)
Inventor
Hiroshi Koshimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7013677A priority Critical patent/JPS544571A/en
Publication of JPS544571A publication Critical patent/JPS544571A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE: To make a plasma treating apparatus which does not cause contamination of the objects being treated and makes possible controlling of temperature of the objects being treated by connecting the chamber provided with a plasma generating high frequency electrode and the chamber provided with the heater for the objects being treated.
COPYRIGHT: (C)1979,JPO&Japio
JP7013677A 1977-06-13 1977-06-13 Plasma treating apparatus Pending JPS544571A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7013677A JPS544571A (en) 1977-06-13 1977-06-13 Plasma treating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7013677A JPS544571A (en) 1977-06-13 1977-06-13 Plasma treating apparatus

Publications (1)

Publication Number Publication Date
JPS544571A true JPS544571A (en) 1979-01-13

Family

ID=13422840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7013677A Pending JPS544571A (en) 1977-06-13 1977-06-13 Plasma treating apparatus

Country Status (1)

Country Link
JP (1) JPS544571A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63260031A (en) * 1986-09-19 1988-10-27 Tokyo Ohka Kogyo Co Ltd Plasma reaction treatment device
JPH0285378A (en) * 1988-09-22 1990-03-26 Hitachi Ltd plasma etching method
JPH08172078A (en) * 1995-07-25 1996-07-02 Tokyo Ohka Kogyo Co Ltd Plasma reaction processor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63260031A (en) * 1986-09-19 1988-10-27 Tokyo Ohka Kogyo Co Ltd Plasma reaction treatment device
JPH0285378A (en) * 1988-09-22 1990-03-26 Hitachi Ltd plasma etching method
JPH08172078A (en) * 1995-07-25 1996-07-02 Tokyo Ohka Kogyo Co Ltd Plasma reaction processor

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