JPS5449092A - Manufacture of crystal vibrator of tuning-fork type - Google Patents
Manufacture of crystal vibrator of tuning-fork typeInfo
- Publication number
- JPS5449092A JPS5449092A JP11581677A JP11581677A JPS5449092A JP S5449092 A JPS5449092 A JP S5449092A JP 11581677 A JP11581677 A JP 11581677A JP 11581677 A JP11581677 A JP 11581677A JP S5449092 A JPS5449092 A JP S5449092A
- Authority
- JP
- Japan
- Prior art keywords
- fork type
- tuning
- manufacture
- vapor
- metal film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000002184 metal Substances 0.000 abstract 3
- 229910052751 metal Inorganic materials 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 1
- 239000002253 acid Substances 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 229960002050 hydrofluoric acid Drugs 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To improve the manufacture yield and work precision by working a part between both arms by photo-etching. CONSTITUTION:A metal film is vapor-deposited on a crystal substrate cut in an appropriate direction, and a vapor-deposition unneeded part is coated with photo resist, which is lifted. Next, the surface is electrolytically plated with gold to make the layer thick, and it is etchec by a fluoric-acid solution of 49%, thereby removing the part covered with no metal film. Next, the metal is etched by acid and cleaned to obtain a crystal substrate in a prescribed shape. On this surface, an electrode is metallized, and separation into respective element pieces, thereby obtaining tuning- fork type crystal vibrators.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11581677A JPS5449092A (en) | 1977-09-27 | 1977-09-27 | Manufacture of crystal vibrator of tuning-fork type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11581677A JPS5449092A (en) | 1977-09-27 | 1977-09-27 | Manufacture of crystal vibrator of tuning-fork type |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5449092A true JPS5449092A (en) | 1979-04-18 |
Family
ID=14671803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11581677A Pending JPS5449092A (en) | 1977-09-27 | 1977-09-27 | Manufacture of crystal vibrator of tuning-fork type |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5449092A (en) |
-
1977
- 1977-09-27 JP JP11581677A patent/JPS5449092A/en active Pending
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