JPS5451373A - Sample processor of scanning electron microoscope and similar unit - Google Patents

Sample processor of scanning electron microoscope and similar unit

Info

Publication number
JPS5451373A
JPS5451373A JP11674277A JP11674277A JPS5451373A JP S5451373 A JPS5451373 A JP S5451373A JP 11674277 A JP11674277 A JP 11674277A JP 11674277 A JP11674277 A JP 11674277A JP S5451373 A JPS5451373 A JP S5451373A
Authority
JP
Japan
Prior art keywords
sample
chamber
processing chamber
air lock
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11674277A
Other languages
Japanese (ja)
Other versions
JPS5856952B2 (en
Inventor
Akimitsu Okura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52116742A priority Critical patent/JPS5856952B2/en
Publication of JPS5451373A publication Critical patent/JPS5451373A/en
Publication of JPS5856952B2 publication Critical patent/JPS5856952B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To improve the operation by preventing frost from sticking during a treatment od frozen sample, by forming a sample processor of a sample processing chamber and spare chamber equipped with a method for processing a sample in the processing chamber.
CONSTITUTION: Sample processing chamber 2 provided in contact with sample chamber 1 can be linked or disconnected vacuously by vacuum-preventive 0 ring 3 and air lock valve 4. Processing chamber 2 is provided with sample mount 7 on which sample 5 and sample table 6 are mounted, and one terminal of mount 7 is dipped in refrigerant 9 of liquid nitrogen in refrigerant container 8. Then, spare chamber 14 is provided which is linked or disconnected vacuously by vacuum- preventive 0 rings 10 and 11, air lock valve 12, and air lock rod 13. Chamber 14 is equipped with gas lead-in valve 15 through which dry gas can be supplied into chamber 14, exhaust valve 16 through which the rotary pump makes stand-by exhaustion, and the device which performs the conduction treatment of sample 5
COPYRIGHT: (C)1979,JPO&Japio
JP52116742A 1977-09-30 1977-09-30 Sample processing equipment for scanning electron microscopes and similar equipment Expired JPS5856952B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52116742A JPS5856952B2 (en) 1977-09-30 1977-09-30 Sample processing equipment for scanning electron microscopes and similar equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52116742A JPS5856952B2 (en) 1977-09-30 1977-09-30 Sample processing equipment for scanning electron microscopes and similar equipment

Publications (2)

Publication Number Publication Date
JPS5451373A true JPS5451373A (en) 1979-04-23
JPS5856952B2 JPS5856952B2 (en) 1983-12-17

Family

ID=14694652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52116742A Expired JPS5856952B2 (en) 1977-09-30 1977-09-30 Sample processing equipment for scanning electron microscopes and similar equipment

Country Status (1)

Country Link
JP (1) JPS5856952B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016122668A (en) * 2016-04-06 2016-07-07 株式会社日立ハイテクノロジーズ Charged particle beam device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016122668A (en) * 2016-04-06 2016-07-07 株式会社日立ハイテクノロジーズ Charged particle beam device

Also Published As

Publication number Publication date
JPS5856952B2 (en) 1983-12-17

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