JPS5452304A - Diaphragm pump - Google Patents

Diaphragm pump

Info

Publication number
JPS5452304A
JPS5452304A JP11018078A JP11018078A JPS5452304A JP S5452304 A JPS5452304 A JP S5452304A JP 11018078 A JP11018078 A JP 11018078A JP 11018078 A JP11018078 A JP 11018078A JP S5452304 A JPS5452304 A JP S5452304A
Authority
JP
Japan
Prior art keywords
diaphragm pump
diaphragm
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11018078A
Other languages
Japanese (ja)
Inventor
Buirumusu Hansu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wilms GmbH
Original Assignee
Wilms GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wilms GmbH filed Critical Wilms GmbH
Publication of JPS5452304A publication Critical patent/JPS5452304A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
    • F04B43/026—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel each plate-like pumping flexible member working in its own pumping chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/067—Pumps having fluid drive the fluid being actuated directly by a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/08—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
    • F04B9/10—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid
    • F04B9/109—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid having plural pumping chambers
    • F04B9/111—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid having plural pumping chambers with two mechanically connected pumping members
    • F04B9/113—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid having plural pumping chambers with two mechanically connected pumping members reciprocating movement of the pumping members being obtained by a double-acting liquid motor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP11018078A 1977-09-12 1978-09-07 Diaphragm pump Pending JPS5452304A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19772741024 DE2741024A1 (en) 1977-09-12 1977-09-12 DIAPHRAGM PUMP

Publications (1)

Publication Number Publication Date
JPS5452304A true JPS5452304A (en) 1979-04-24

Family

ID=6018748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11018078A Pending JPS5452304A (en) 1977-09-12 1978-09-07 Diaphragm pump

Country Status (10)

Country Link
JP (1) JPS5452304A (en)
BR (1) BR7805911A (en)
CH (1) CH634129A5 (en)
DE (1) DE2741024A1 (en)
ES (1) ES473241A1 (en)
FR (1) FR2402782A1 (en)
GB (1) GB2003975A (en)
IT (1) IT1098595B (en)
NL (1) NL7809068A (en)
SE (1) SE7809534L (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60192888A (en) * 1984-03-13 1985-10-01 Yamada Yuki Seizo Kk Fixed-quantity discharging device of multi-type fluid materials
JPH01245812A (en) * 1988-03-28 1989-10-02 Takeshi Hoya Method and device for transferring slurry under pressure

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62102880U (en) * 1985-12-19 1987-06-30
DE3706338A1 (en) * 1987-02-27 1988-09-08 Wagner Gmbh J DIAPHRAGM PUMP DEVICE
FR2623570B1 (en) * 1987-11-20 1993-06-18 Rech Fabrication Indle Et INTERMEDIATE FLUID PRESSURE MULTIPLIER
DE8801660U1 (en) * 1988-02-10 1988-03-31 Henkel, Wolfgang Eberhard, 6832 Hockenheim Diaphragm strain gauge for ball diaphragm pumps
DE3907735A1 (en) * 1989-03-10 1990-09-20 Bran & Luebbe DIAPHRAGM PUMP WITH FREE-SWINGING METAL DIAPHRAGM
WO1992019867A1 (en) * 1991-05-03 1992-11-12 Hans Willi Meinz Process and device for the controlled metering of at least one pourable component
NL9101556A (en) * 1991-09-16 1993-04-16 Holthuis Bv CONTROL SYSTEM FOR PISTON MEMBRANE PUMP.
DE4319803A1 (en) * 1993-06-15 1994-12-22 Ihd Werkzeugmaschinen Handelsg Hydraulic pump device
TW539918B (en) 1997-05-27 2003-07-01 Tokyo Electron Ltd Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
US6748960B1 (en) 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
KR100744888B1 (en) 1999-11-02 2007-08-01 동경 엘렉트론 주식회사 Apparatus and method for supercritical processing of materials
TW499548B (en) * 2000-06-02 2002-08-21 Tokyo Electron Ltd Dual diaphragm pump
AU2001290171A1 (en) 2000-07-26 2002-02-05 Tokyo Electron Limited High pressure processing chamber for semiconductor substrate
US7001468B1 (en) 2002-02-15 2006-02-21 Tokyo Electron Limited Pressure energized pressure vessel opening and closing device and method of providing therefor
US7387868B2 (en) 2002-03-04 2008-06-17 Tokyo Electron Limited Treatment of a dielectric layer using supercritical CO2
US7021635B2 (en) 2003-02-06 2006-04-04 Tokyo Electron Limited Vacuum chuck utilizing sintered material and method of providing thereof
US7077917B2 (en) 2003-02-10 2006-07-18 Tokyo Electric Limited High-pressure processing chamber for a semiconductor wafer
US7225820B2 (en) 2003-02-10 2007-06-05 Tokyo Electron Limited High-pressure processing chamber for a semiconductor wafer
US7270137B2 (en) 2003-04-28 2007-09-18 Tokyo Electron Limited Apparatus and method of securing a workpiece during high-pressure processing
US7163380B2 (en) 2003-07-29 2007-01-16 Tokyo Electron Limited Control of fluid flow in the processing of an object with a fluid
US7186093B2 (en) 2004-10-05 2007-03-06 Tokyo Electron Limited Method and apparatus for cooling motor bearings of a high pressure pump
US7250374B2 (en) 2004-06-30 2007-07-31 Tokyo Electron Limited System and method for processing a substrate using supercritical carbon dioxide processing
US7307019B2 (en) 2004-09-29 2007-12-11 Tokyo Electron Limited Method for supercritical carbon dioxide processing of fluoro-carbon films
US7491036B2 (en) 2004-11-12 2009-02-17 Tokyo Electron Limited Method and system for cooling a pump
US7434590B2 (en) 2004-12-22 2008-10-14 Tokyo Electron Limited Method and apparatus for clamping a substrate in a high pressure processing system
US7140393B2 (en) 2004-12-22 2006-11-28 Tokyo Electron Limited Non-contact shuttle valve for flow diversion in high pressure systems
US7291565B2 (en) 2005-02-15 2007-11-06 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US7435447B2 (en) 2005-02-15 2008-10-14 Tokyo Electron Limited Method and system for determining flow conditions in a high pressure processing system
US7380984B2 (en) 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US7767145B2 (en) 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US7494107B2 (en) 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
US7524383B2 (en) 2005-05-25 2009-04-28 Tokyo Electron Limited Method and system for passivating a processing chamber
DE102010005362A1 (en) * 2009-01-22 2010-07-29 Robert Bosch Gmbh Hydro machine arrangement
GB2518411B (en) * 2013-09-20 2020-04-29 Alveier Ltd Pump Control
CN108119344B (en) * 2018-02-10 2024-06-04 台州信溢农业机械有限公司 Automatic control electric diaphragm pump with damping function
CN114856954B (en) * 2022-07-07 2022-11-04 中建环能科技股份有限公司 Piston pump and wastewater treatment device with same
CN115405505A (en) * 2022-09-28 2022-11-29 上海羿弓氢能科技有限公司 A liquid driven diaphragm type hydrogen filling compressor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60192888A (en) * 1984-03-13 1985-10-01 Yamada Yuki Seizo Kk Fixed-quantity discharging device of multi-type fluid materials
JPH01245812A (en) * 1988-03-28 1989-10-02 Takeshi Hoya Method and device for transferring slurry under pressure

Also Published As

Publication number Publication date
DE2741024A1 (en) 1979-03-22
CH634129A5 (en) 1983-01-14
NL7809068A (en) 1979-03-14
FR2402782A1 (en) 1979-04-06
IT1098595B (en) 1985-09-07
SE7809534L (en) 1979-03-13
IT7827551A0 (en) 1978-09-12
BR7805911A (en) 1979-05-08
GB2003975A (en) 1979-03-21
ES473241A1 (en) 1979-03-16

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