JPS5456770A - Exposure device - Google Patents

Exposure device

Info

Publication number
JPS5456770A
JPS5456770A JP12370277A JP12370277A JPS5456770A JP S5456770 A JPS5456770 A JP S5456770A JP 12370277 A JP12370277 A JP 12370277A JP 12370277 A JP12370277 A JP 12370277A JP S5456770 A JPS5456770 A JP S5456770A
Authority
JP
Japan
Prior art keywords
panel
exposure
sucking disk
cylinder
unevenness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12370277A
Other languages
Japanese (ja)
Other versions
JPS598935B2 (en
Inventor
Kenji Nojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP52123702A priority Critical patent/JPS598935B2/en
Publication of JPS5456770A publication Critical patent/JPS5456770A/en
Publication of JPS598935B2 publication Critical patent/JPS598935B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To form a light absorbing film free from unevenness by making the panel holding mechanism break away from the panel surface at least during the exposure time.
CONSTITUTION: The panel is put on vacuum sucking disk 14 of mounting machine 13 waiting at position A with the outer surface of the panel turned down to be adsorbed (15). Machine 13 turns around axle 16 and stops at fixed position B, and cylinder 17 expands to put the panel onto the fixed position of exposure machin 12. Under these conditions, an exposure is given, and thus the rubber sucking disk adhered to the panel absorbs the light transmitted through the panel glass. As a result, the reflective light is reduced, and the resist film area is reduced there, causing uneven shape of the sucking disk. In this respect, the adsorption is released and the sucking disk is moved 10mm away from the panel surface, and then the exposure is given. After exposure, the cylinder is expanded again to secure adsorption. In such way, a light absorbing film is obtained with no unevenness relating the panel holding unit owing to the automatic panel attachment/ detachment method
COPYRIGHT: (C)1979,JPO&Japio
JP52123702A 1977-10-15 1977-10-15 exposure equipment Expired JPS598935B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52123702A JPS598935B2 (en) 1977-10-15 1977-10-15 exposure equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52123702A JPS598935B2 (en) 1977-10-15 1977-10-15 exposure equipment

Publications (2)

Publication Number Publication Date
JPS5456770A true JPS5456770A (en) 1979-05-08
JPS598935B2 JPS598935B2 (en) 1984-02-28

Family

ID=14867219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52123702A Expired JPS598935B2 (en) 1977-10-15 1977-10-15 exposure equipment

Country Status (1)

Country Link
JP (1) JPS598935B2 (en)

Also Published As

Publication number Publication date
JPS598935B2 (en) 1984-02-28

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