JPS5458411A - Pickup cartridge and production of the same - Google Patents
Pickup cartridge and production of the sameInfo
- Publication number
- JPS5458411A JPS5458411A JP12556277A JP12556277A JPS5458411A JP S5458411 A JPS5458411 A JP S5458411A JP 12556277 A JP12556277 A JP 12556277A JP 12556277 A JP12556277 A JP 12556277A JP S5458411 A JPS5458411 A JP S5458411A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- vapor deposition
- boron
- short time
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable cantilevers having high specific modulus layers to be readily formed in a short time and achieve the improvement in frequency characteristics, transient characteristics, etc. inexpensively by continuously using a plasma chemical vapor deposition process and an atmospheric chemical vapor deposition process.
CONSTITUTION: A base of solid bar form or pipe form, e.b., Al wire 16, is heated in a reaction furnace and a first boron layer 18 of an evenly high density of more than 5000kg/mm2 in specific modulus is formed on the outside of the wire by mixed gases of BCl3 and H2 in plasma condition under reduced pressure. Following to this, a second boron layer 19 of an evenly low density is formed in a short time on the layer 18 through chemical reaction under atmospheric pressure. This semifinished product of cantilever is cut to a suitable lenght, after which the wire 16 is removed by chemical etching process, whereby the pipe form cantilever body 21 of the boron alone may be obtained. A diamond tip 20 is fixed to this body 21 by bonding or burying
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12556277A JPS5458411A (en) | 1977-10-18 | 1977-10-18 | Pickup cartridge and production of the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12556277A JPS5458411A (en) | 1977-10-18 | 1977-10-18 | Pickup cartridge and production of the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5458411A true JPS5458411A (en) | 1979-05-11 |
Family
ID=14913257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12556277A Pending JPS5458411A (en) | 1977-10-18 | 1977-10-18 | Pickup cartridge and production of the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5458411A (en) |
-
1977
- 1977-10-18 JP JP12556277A patent/JPS5458411A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6417870A (en) | Manufacture of carbon | |
| JPS5458411A (en) | Pickup cartridge and production of the same | |
| JPS5272399A (en) | Method and apparatus for growth of single crystals of al2o3 from gas p hase | |
| JPS5458410A (en) | Pickup cartridge and production of the same | |
| EP0730266A3 (en) | Apparatus for plasma-processing a disk substrate and method of manufacturing a magnetic disk | |
| JPS5458409A (en) | Production of cantilever | |
| JPS53110378A (en) | Plasma carrying device | |
| JPS5458415A (en) | Pickup arm and production of the same | |
| JPS5458416A (en) | Pickup arm and production of the same | |
| JPS51146389A (en) | Process for production of silver nitrate | |
| JPS5448502A (en) | Pickup cartridge and production of the same | |
| JPS55162412A (en) | Manufacture of carbonaceous whisker | |
| JPS55149195A (en) | Manufacture of silicon carbide substrate | |
| JPS55136119A (en) | Manufacture of boron structural material | |
| JPS56111104A (en) | Cantilever for pickup cartridge | |
| JPS5245385A (en) | Process for production of tube bundle | |
| JP2000038580A (en) | Etching gas | |
| JPS643097A (en) | Substrate having high heat conductivity | |
| JPS563680A (en) | Etching method | |
| JPS63215597A (en) | Method for producing diamond thin film or diamond-like thin film | |
| JPS5458405A (en) | Productin of cantilever | |
| JPS5425299A (en) | Method of producing silicone nitride | |
| JPS5376752A (en) | Production of semionductor device | |
| JPS5298474A (en) | Vapor phase growth under reduced pressure | |
| JPS542670A (en) | Plasma etching method |