JPS54590A - Element isolating method - Google Patents

Element isolating method

Info

Publication number
JPS54590A
JPS54590A JP6482377A JP6482377A JPS54590A JP S54590 A JPS54590 A JP S54590A JP 6482377 A JP6482377 A JP 6482377A JP 6482377 A JP6482377 A JP 6482377A JP S54590 A JPS54590 A JP S54590A
Authority
JP
Japan
Prior art keywords
element isolating
recesses
nucleus
isolating method
bird
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6482377A
Other languages
Japanese (ja)
Inventor
Hiroji Saida
Masahiko Kogirima
Masao Kawamura
Mitsuo Nanba
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6482377A priority Critical patent/JPS54590A/en
Publication of JPS54590A publication Critical patent/JPS54590A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)

Abstract

PURPOSE: To obtain isolation of isoplanar structure free from bird heads and bird beaks by covering the entire surface formed with recesses in element isolating regions with an insulating film, forming a growth nucleus in the bottom of each recess and burying the recesses by causing selective growth with this as a nucleus.
COPYRIGHT: (C)1979,JPO&Japio
JP6482377A 1977-06-03 1977-06-03 Element isolating method Pending JPS54590A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6482377A JPS54590A (en) 1977-06-03 1977-06-03 Element isolating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6482377A JPS54590A (en) 1977-06-03 1977-06-03 Element isolating method

Publications (1)

Publication Number Publication Date
JPS54590A true JPS54590A (en) 1979-01-05

Family

ID=13269348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6482377A Pending JPS54590A (en) 1977-06-03 1977-06-03 Element isolating method

Country Status (1)

Country Link
JP (1) JPS54590A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55138251A (en) * 1979-04-11 1980-10-28 Hitachi Ltd Method for dielectric isolation of semiconductor element
JPS598351A (en) * 1982-06-30 1984-01-17 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Method of forming insulating region on semiconductor substrate
JPS5958838A (en) * 1982-09-29 1984-04-04 Hitachi Ltd Semiconductor device
JPS59119849A (en) * 1982-12-27 1984-07-11 Fujitsu Ltd Manufacture of semiconductor device
JPS59188141A (en) * 1984-03-26 1984-10-25 Hitachi Ltd Semiconductor integrated circuit
JPS6090473A (en) * 1983-10-24 1985-05-21 Matsushita Electronics Corp solid-state imaging device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55138251A (en) * 1979-04-11 1980-10-28 Hitachi Ltd Method for dielectric isolation of semiconductor element
JPS598351A (en) * 1982-06-30 1984-01-17 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Method of forming insulating region on semiconductor substrate
JPS5958838A (en) * 1982-09-29 1984-04-04 Hitachi Ltd Semiconductor device
JPS59119849A (en) * 1982-12-27 1984-07-11 Fujitsu Ltd Manufacture of semiconductor device
JPS6090473A (en) * 1983-10-24 1985-05-21 Matsushita Electronics Corp solid-state imaging device
JPS59188141A (en) * 1984-03-26 1984-10-25 Hitachi Ltd Semiconductor integrated circuit

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