JPS5461479A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number: JPS5461479A
Authority: JP; Japan
Prior art keywords: photo resist; oxide film; silicon oxide; etching; manufacture
Prior art date: 1977-10-25
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP12846977A

Other languages

English (en)

Japanese (ja)

Other versions

JPS6258141B2 (de

Inventor

Koji Yamada

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

NEC Corp

Original Assignee

NEC Corp

Nippon Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-10-25

Filing date

1977-10-25

Publication date

1979-05-17

1977-10-25 Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp

1977-10-25 Priority to JP12846977A priority Critical patent/JPS5461479A/ja

1979-05-17 Publication of JPS5461479A publication Critical patent/JPS5461479A/ja

1987-12-04 Publication of JPS6258141B2 publication Critical patent/JPS6258141B2/ja

Status Granted legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title 1
239000004065 semiconductor Substances 0.000 title 1
229920002120 photoresistant polymer Polymers 0.000 abstract 3
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
238000005530 etching Methods 0.000 abstract 2
229910052814 silicon oxide Inorganic materials 0.000 abstract 2
WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 abstract 1
DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 abstract 1
WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 abstract 1
KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 1
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
239000002253 acid Substances 0.000 abstract 1
229930016911 cinnamic acid Natural products 0.000 abstract 1
235000013985 cinnamic acid Nutrition 0.000 abstract 1
229960002050 hydrofluoric acid Drugs 0.000 abstract 1
WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 abstract 1
239000000203 mixture Substances 0.000 abstract 1
229910052710 silicon Inorganic materials 0.000 abstract 1
239000010703 silicon Substances 0.000 abstract 1
125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 abstract 1
229920002554 vinyl polymer Polymers 0.000 abstract 1

Landscapes

Weting (AREA)

JP12846977A 1977-10-25 1977-10-25 Manufacture for semiconductor device Granted JPS5461479A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP12846977A JPS5461479A (en)	1977-10-25	1977-10-25	Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP12846977A JPS5461479A (en)	1977-10-25	1977-10-25	Manufacture for semiconductor device

Publications (2)

Publication Number	Publication Date
JPS5461479A true JPS5461479A (en)	1979-05-17
JPS6258141B2 JPS6258141B2 (de)	1987-12-04

Family

ID=14985492

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP12846977A Granted JPS5461479A (en)	1977-10-25	1977-10-25	Manufacture for semiconductor device

Country Status (1)

Country	Link
JP (1)	JPS5461479A (de)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4842682A (de) *	1971-09-29	1973-06-21

1977
- 1977-10-25 JP JP12846977A patent/JPS5461479A/ja active Granted

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4842682A (de) *	1971-09-29	1973-06-21

Also Published As

Publication number	Publication date
JPS6258141B2 (de)	1987-12-04

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