JPS5467480A - Differential pressure detector - Google Patents

Differential pressure detector

Info

Publication number
JPS5467480A
JPS5467480A JP13356477A JP13356477A JPS5467480A JP S5467480 A JPS5467480 A JP S5467480A JP 13356477 A JP13356477 A JP 13356477A JP 13356477 A JP13356477 A JP 13356477A JP S5467480 A JPS5467480 A JP S5467480A
Authority
JP
Japan
Prior art keywords
pressure
sensitive element
differential pressure
pressure sensitive
static
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13356477A
Other languages
Japanese (ja)
Inventor
Shigemi Nakada
Masami Tanitsu
Hiroshi Idekawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13356477A priority Critical patent/JPS5467480A/en
Publication of JPS5467480A publication Critical patent/JPS5467480A/en
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To generate the output signals, which have little dependency upon static pressure and which is proportional to the differential pressure by using a pressure sensitive element for static pressure measurement in addition to a pressure sensitive element for differential pressure detection and by properly selecting the variation in the resistance due to the fluctuations in the static pressure.
CONSTITUTION: A pressure sensitive element 20 for metering the static pressure at a higher pressure side PH is composed of distrosion resistive elements 20a and 20b which are prepared by diffusing an impurity onto a single crystal of semiconductor such as silicone. The pressure sensitive element 20 is attached to a body case 2 such that it is in liquid contact with such a pressure transmitter 6b as is sealed with a diaphragm 5b at the higher pressure side PH and a pressure sensitive element 1. The output of the element 20 is fed to a differential pressure detecting circuit 23 through a cable 22 in a similar manner to that of the element 1. By properly selecting the variations in the resistance in that way, it is possible to generate such output signals as has little dependency upon static pressure ans as is proportional to the differential pressure.
COPYRIGHT: (C)1979,JPO&Japio
JP13356477A 1977-11-09 1977-11-09 Differential pressure detector Pending JPS5467480A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13356477A JPS5467480A (en) 1977-11-09 1977-11-09 Differential pressure detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13356477A JPS5467480A (en) 1977-11-09 1977-11-09 Differential pressure detector

Publications (1)

Publication Number Publication Date
JPS5467480A true JPS5467480A (en) 1979-05-30

Family

ID=15107743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13356477A Pending JPS5467480A (en) 1977-11-09 1977-11-09 Differential pressure detector

Country Status (1)

Country Link
JP (1) JPS5467480A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5634736U (en) * 1979-08-24 1981-04-04
JPS56137238A (en) * 1980-03-31 1981-10-27 Toshiba Corp Differential pressure transmitter
JPS6038634A (en) * 1983-07-08 1985-02-28 ケント‐テイエギ・エッセ・ピー・アー Differential pressure transmitter functioning as hydrostaticvariation compensation for industrial rpocess fluid in combination

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5634736U (en) * 1979-08-24 1981-04-04
JPS56137238A (en) * 1980-03-31 1981-10-27 Toshiba Corp Differential pressure transmitter
JPS6038634A (en) * 1983-07-08 1985-02-28 ケント‐テイエギ・エッセ・ピー・アー Differential pressure transmitter functioning as hydrostaticvariation compensation for industrial rpocess fluid in combination

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