JPS5468694A - Electron spectroscopic apparatus - Google Patents
Electron spectroscopic apparatusInfo
- Publication number
- JPS5468694A JPS5468694A JP13536477A JP13536477A JPS5468694A JP S5468694 A JPS5468694 A JP S5468694A JP 13536477 A JP13536477 A JP 13536477A JP 13536477 A JP13536477 A JP 13536477A JP S5468694 A JPS5468694 A JP S5468694A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- energy
- bias voltage
- electron
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 abstract 2
- 230000005684 electric field Effects 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE:To analyze the internal structure of sample by applying a bias voltage to the sample with respect to the electron beam incident part of an energy analyzing means. CONSTITUTION:The electron beams 2 generated from an electron gun 1 are finely focused by a focusing lens 3 and are radiated onto a smple 4. The Auger electrons (e) generated from the sample by the electron radiation are introduced into a cylindrical energy analyzer 6 constituted by an outer tube 5a and inner tube 5b disposed coaxially, where they are deflected and focused for each energy by the electric field formed between the outer and inner tubes by a sweep power source 7 and are detected with a detector 8. Here, when a bias voltage is applied to the sample 4 and a bias voltage is also applied from a variable bias power source 11 to an energy analyzer 6, shifting of energy values will not occur. As a result, accurate fixing of the element may be performed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52135364A JPS5830698B2 (en) | 1977-11-11 | 1977-11-11 | electron spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52135364A JPS5830698B2 (en) | 1977-11-11 | 1977-11-11 | electron spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5468694A true JPS5468694A (en) | 1979-06-01 |
| JPS5830698B2 JPS5830698B2 (en) | 1983-06-30 |
Family
ID=15150001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP52135364A Expired JPS5830698B2 (en) | 1977-11-11 | 1977-11-11 | electron spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5830698B2 (en) |
-
1977
- 1977-11-11 JP JP52135364A patent/JPS5830698B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5830698B2 (en) | 1983-06-30 |
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