JPS5468694A - Electron spectroscopic apparatus - Google Patents

Electron spectroscopic apparatus

Info

Publication number
JPS5468694A
JPS5468694A JP13536477A JP13536477A JPS5468694A JP S5468694 A JPS5468694 A JP S5468694A JP 13536477 A JP13536477 A JP 13536477A JP 13536477 A JP13536477 A JP 13536477A JP S5468694 A JPS5468694 A JP S5468694A
Authority
JP
Japan
Prior art keywords
sample
energy
bias voltage
electron
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13536477A
Other languages
Japanese (ja)
Other versions
JPS5830698B2 (en
Inventor
Akinori Mogami
Yuji Nagasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP52135364A priority Critical patent/JPS5830698B2/en
Publication of JPS5468694A publication Critical patent/JPS5468694A/en
Publication of JPS5830698B2 publication Critical patent/JPS5830698B2/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To analyze the internal structure of sample by applying a bias voltage to the sample with respect to the electron beam incident part of an energy analyzing means. CONSTITUTION:The electron beams 2 generated from an electron gun 1 are finely focused by a focusing lens 3 and are radiated onto a smple 4. The Auger electrons (e) generated from the sample by the electron radiation are introduced into a cylindrical energy analyzer 6 constituted by an outer tube 5a and inner tube 5b disposed coaxially, where they are deflected and focused for each energy by the electric field formed between the outer and inner tubes by a sweep power source 7 and are detected with a detector 8. Here, when a bias voltage is applied to the sample 4 and a bias voltage is also applied from a variable bias power source 11 to an energy analyzer 6, shifting of energy values will not occur. As a result, accurate fixing of the element may be performed.
JP52135364A 1977-11-11 1977-11-11 electron spectrometer Expired JPS5830698B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52135364A JPS5830698B2 (en) 1977-11-11 1977-11-11 electron spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52135364A JPS5830698B2 (en) 1977-11-11 1977-11-11 electron spectrometer

Publications (2)

Publication Number Publication Date
JPS5468694A true JPS5468694A (en) 1979-06-01
JPS5830698B2 JPS5830698B2 (en) 1983-06-30

Family

ID=15150001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52135364A Expired JPS5830698B2 (en) 1977-11-11 1977-11-11 electron spectrometer

Country Status (1)

Country Link
JP (1) JPS5830698B2 (en)

Also Published As

Publication number Publication date
JPS5830698B2 (en) 1983-06-30

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