JPS5473065A - Interferometer - Google Patents

Interferometer

Info

Publication number
JPS5473065A
JPS5473065A JP14028777A JP14028777A JPS5473065A JP S5473065 A JPS5473065 A JP S5473065A JP 14028777 A JP14028777 A JP 14028777A JP 14028777 A JP14028777 A JP 14028777A JP S5473065 A JPS5473065 A JP S5473065A
Authority
JP
Japan
Prior art keywords
face
examined
reflected
light splitter
enters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14028777A
Other languages
Japanese (ja)
Inventor
Tetsuo Sueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP14028777A priority Critical patent/JPS5473065A/en
Publication of JPS5473065A publication Critical patent/JPS5473065A/en
Pending legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE: To reduce aberrations and eliminate the need for any aberration correcting lens by installing a light splitter within an optical prototype and other.
CONSTITUTION: A light splitter 21 is disposed within an optical prototype 20 having a reference curved face 23 and the incident face 22 and the face to be examined 12 of the optical prototype 20 are formed to the curved faces having the same curvature center A as that of the reference curved face 23. Then, the luminous flux 2 of a long interferable distance emitted from a light source 1 such as laser, etc. is condensed at the curvature center A by a lens 3, after which it becomes expanded light 4 and enters the incident face 22 perpendicularly. Part thereof transmits through the light splitter 21 and enters the reference curved face 23 and further part thereof enters the face to be examined 12 and transmits through the reference courved face 23, where it is superposed with the reference wave having been first reflected by the reference curved face 23, where if is superposed with the reference wave having been first reflected by the reference curved face 23. Next, it is reflected by the light splitter 21 to form interferece fringes on a screen 13, letting the face accuracy of the face to be examined 12 be measured.
COPYRIGHT: (C)1979,JPO&Japio
JP14028777A 1977-11-22 1977-11-22 Interferometer Pending JPS5473065A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14028777A JPS5473065A (en) 1977-11-22 1977-11-22 Interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14028777A JPS5473065A (en) 1977-11-22 1977-11-22 Interferometer

Publications (1)

Publication Number Publication Date
JPS5473065A true JPS5473065A (en) 1979-06-12

Family

ID=15265265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14028777A Pending JPS5473065A (en) 1977-11-22 1977-11-22 Interferometer

Country Status (1)

Country Link
JP (1) JPS5473065A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4406520A (en) * 1980-08-14 1983-09-27 Universal Pioneer Corporation Beam splitter optical system of signal pickup device
US4407563A (en) * 1981-12-22 1983-10-04 The United States Of America As Represented By The United States National Aeronautics And Space Administration High speed multi focal plane optical system
JP2001249003A (en) * 1999-12-27 2001-09-14 Canon Inc Optical interference device and position detection device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4406520A (en) * 1980-08-14 1983-09-27 Universal Pioneer Corporation Beam splitter optical system of signal pickup device
US4407563A (en) * 1981-12-22 1983-10-04 The United States Of America As Represented By The United States National Aeronautics And Space Administration High speed multi focal plane optical system
JP2001249003A (en) * 1999-12-27 2001-09-14 Canon Inc Optical interference device and position detection device

Similar Documents

Publication Publication Date Title
JPS5246813A (en) Photographic optical system for observation for ophthalmofunduscopic c amera
JPS5473065A (en) Interferometer
JPS5432318A (en) Lens for micro-reduction photography
JPS52132851A (en) Optical detector of scanning type
JPS5667822A (en) Focal diaphragm
JPS52113750A (en) Scanning optical system having beam detecting optics for information
JPS55140102A (en) Measuring device for flatness of inspected plane glass
GB1454675A (en) Optical system for objective refractor for the eye
JPS51151571A (en) Aiming tool of laser beam
JPS5440662A (en) Range finder
JPS55124008A (en) Defect inspecting apparatus
GB570022A (en) A projection system for the inspection of internal surfaces
JPS52147449A (en) Optical branching and condensing devices
SU135664A1 (en) Mirror multiplier with parallel mirrors
JPS6413426A (en) Monochromatic light source dual luminous flux interferometer
Matveev et al. Properties of noncoherent Fourier-transforming optical systems
FR2453392A1 (en) Optical surface thickness measuring technique - uses separation of point source and secondary image to determine thickness of semiconductor at primary image point
SU711521A1 (en) Unit for shaping the grid of autocollimating sighting telescope
JPS5313921A (en) Image observation device
JPS5622902A (en) Measuring method for thickness of transparent plate
JPS5468668A (en) Newton ring measuring apparatus
JPS54151881A (en) Spot meter of laser beam
JPS53117448A (en) Modulating optical system
JPS5350852A (en) Half tone image forming optical system
JPS55103402A (en) Linear gauge