JPS5473065A - Interferometer - Google Patents
InterferometerInfo
- Publication number
- JPS5473065A JPS5473065A JP14028777A JP14028777A JPS5473065A JP S5473065 A JPS5473065 A JP S5473065A JP 14028777 A JP14028777 A JP 14028777A JP 14028777 A JP14028777 A JP 14028777A JP S5473065 A JPS5473065 A JP S5473065A
- Authority
- JP
- Japan
- Prior art keywords
- face
- examined
- reflected
- light splitter
- enters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
PURPOSE: To reduce aberrations and eliminate the need for any aberration correcting lens by installing a light splitter within an optical prototype and other.
CONSTITUTION: A light splitter 21 is disposed within an optical prototype 20 having a reference curved face 23 and the incident face 22 and the face to be examined 12 of the optical prototype 20 are formed to the curved faces having the same curvature center A as that of the reference curved face 23. Then, the luminous flux 2 of a long interferable distance emitted from a light source 1 such as laser, etc. is condensed at the curvature center A by a lens 3, after which it becomes expanded light 4 and enters the incident face 22 perpendicularly. Part thereof transmits through the light splitter 21 and enters the reference curved face 23 and further part thereof enters the face to be examined 12 and transmits through the reference courved face 23, where it is superposed with the reference wave having been first reflected by the reference curved face 23, where if is superposed with the reference wave having been first reflected by the reference curved face 23. Next, it is reflected by the light splitter 21 to form interferece fringes on a screen 13, letting the face accuracy of the face to be examined 12 be measured.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14028777A JPS5473065A (en) | 1977-11-22 | 1977-11-22 | Interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14028777A JPS5473065A (en) | 1977-11-22 | 1977-11-22 | Interferometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5473065A true JPS5473065A (en) | 1979-06-12 |
Family
ID=15265265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14028777A Pending JPS5473065A (en) | 1977-11-22 | 1977-11-22 | Interferometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5473065A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4406520A (en) * | 1980-08-14 | 1983-09-27 | Universal Pioneer Corporation | Beam splitter optical system of signal pickup device |
| US4407563A (en) * | 1981-12-22 | 1983-10-04 | The United States Of America As Represented By The United States National Aeronautics And Space Administration | High speed multi focal plane optical system |
| JP2001249003A (en) * | 1999-12-27 | 2001-09-14 | Canon Inc | Optical interference device and position detection device |
-
1977
- 1977-11-22 JP JP14028777A patent/JPS5473065A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4406520A (en) * | 1980-08-14 | 1983-09-27 | Universal Pioneer Corporation | Beam splitter optical system of signal pickup device |
| US4407563A (en) * | 1981-12-22 | 1983-10-04 | The United States Of America As Represented By The United States National Aeronautics And Space Administration | High speed multi focal plane optical system |
| JP2001249003A (en) * | 1999-12-27 | 2001-09-14 | Canon Inc | Optical interference device and position detection device |
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