JPS5476073A - Cubic probe card - Google Patents

Cubic probe card

Info

Publication number
JPS5476073A
JPS5476073A JP14412377A JP14412377A JPS5476073A JP S5476073 A JPS5476073 A JP S5476073A JP 14412377 A JP14412377 A JP 14412377A JP 14412377 A JP14412377 A JP 14412377A JP S5476073 A JPS5476073 A JP S5476073A
Authority
JP
Japan
Prior art keywords
probe card
probe
cubic
bumps
laminating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14412377A
Other languages
Japanese (ja)
Inventor
Yoshimitsu Suyama
Hiromichi Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14412377A priority Critical patent/JPS5476073A/en
Publication of JPS5476073A publication Critical patent/JPS5476073A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

PURPOSE: To enable to electrical contact with a number of bumps with probe needles in minimized pitch, by laminating the probe cards different in the arrangement of probes.
CONSTITUTION: The probe card 6 isolated with a given distance is laminated by linking pin 7 on the probe card 5. Thus, the approach of the semiconductor chip can be sectioned to two surfaces and the bumps of multi-stage arrangement can be contacted with the probe needles in minimized pitch by laminating a plurality of stages.
COPYRIGHT: (C)1979,JPO&Japio
JP14412377A 1977-11-30 1977-11-30 Cubic probe card Pending JPS5476073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14412377A JPS5476073A (en) 1977-11-30 1977-11-30 Cubic probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14412377A JPS5476073A (en) 1977-11-30 1977-11-30 Cubic probe card

Publications (1)

Publication Number Publication Date
JPS5476073A true JPS5476073A (en) 1979-06-18

Family

ID=15354720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14412377A Pending JPS5476073A (en) 1977-11-30 1977-11-30 Cubic probe card

Country Status (1)

Country Link
JP (1) JPS5476073A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0221268A (en) * 1988-07-11 1990-01-24 Tokyo Electron Ltd Contact type prober for electric inspection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0221268A (en) * 1988-07-11 1990-01-24 Tokyo Electron Ltd Contact type prober for electric inspection

Similar Documents

Publication Publication Date Title
JPS52101062A (en) Percentage indicator
JPS5476073A (en) Cubic probe card
JPS5321543A (en) Square root arithmetic circuit
JPS5440082A (en) Semiconductor test device
JPS52130533A (en) Memory card tester
JPS52117078A (en) Head for measuring semiconductor integrated circuit device
JPS5354469A (en) Semiconductor integrated circuit
JPS53136978A (en) Semiconductor device
JPS5399784A (en) Integrated circuit device
JPS52138849A (en) Logic integrated circuit
JPS5335472A (en) Production of semiconductor unit
JPS5329633A (en) Classificating calculator
JPS5261448A (en) Electronic computer organization featuring tracking function
JPS5317233A (en) Device assignment system
JPS5291334A (en) Multi-access memory method and memory chips therefor
JPS5376627A (en) Multiple-unput keyboard circuit
JPS52115188A (en) Prober
JPS524118A (en) Package system of electronic calculator
JPS52116337A (en) Electronic game device
JPS51112291A (en) Semiconductor integrating circuit device
JPS5242045A (en) Electronic desk type calculator
JPS5325394A (en) Se miconductor device
JPS5313845A (en) Magnetid bubble memory device
JPS53142691A (en) Penetration terminal board
JPS52142967A (en) Electronic part accommodating package