JPS548977A - Expressing method for etch pit of semiconductor crystal of compound of group iii-v - Google Patents

Expressing method for etch pit of semiconductor crystal of compound of group iii-v

Info

Publication number
JPS548977A
JPS548977A JP7388877A JP7388877A JPS548977A JP S548977 A JPS548977 A JP S548977A JP 7388877 A JP7388877 A JP 7388877A JP 7388877 A JP7388877 A JP 7388877A JP S548977 A JPS548977 A JP S548977A
Authority
JP
Japan
Prior art keywords
compound
group iii
semiconductor crystal
etch pit
expressing method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7388877A
Other languages
Japanese (ja)
Other versions
JPS575053B2 (en
Inventor
Toshihiro Kusuki
Kenzo Akita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7388877A priority Critical patent/JPS548977A/en
Publication of JPS548977A publication Critical patent/JPS548977A/en
Publication of JPS575053B2 publication Critical patent/JPS575053B2/ja
Granted legal-status Critical Current

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  • Weting (AREA)

Abstract

PURPOSE: To observe etch pits of surfaces (111) and (100) by making a solution, which contains more than one kind of fluoric acid, phosphoric acid, or acetic acid and hydrogeniodide, touch a semiconductor crystal of a compound of group III -V.
COPYRIGHT: (C)1979,JPO&Japio
JP7388877A 1977-06-23 1977-06-23 Expressing method for etch pit of semiconductor crystal of compound of group iii-v Granted JPS548977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7388877A JPS548977A (en) 1977-06-23 1977-06-23 Expressing method for etch pit of semiconductor crystal of compound of group iii-v

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7388877A JPS548977A (en) 1977-06-23 1977-06-23 Expressing method for etch pit of semiconductor crystal of compound of group iii-v

Publications (2)

Publication Number Publication Date
JPS548977A true JPS548977A (en) 1979-01-23
JPS575053B2 JPS575053B2 (en) 1982-01-28

Family

ID=13531188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7388877A Granted JPS548977A (en) 1977-06-23 1977-06-23 Expressing method for etch pit of semiconductor crystal of compound of group iii-v

Country Status (1)

Country Link
JP (1) JPS548977A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57146844A (en) * 1981-03-09 1982-09-10 Kan Sougou Setsukei Kk Building method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57146844A (en) * 1981-03-09 1982-09-10 Kan Sougou Setsukei Kk Building method

Also Published As

Publication number Publication date
JPS575053B2 (en) 1982-01-28

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