JPS548978A - Manufacture of photto mask - Google Patents

Manufacture of photto mask

Info

Publication number
JPS548978A
JPS548978A JP7519177A JP7519177A JPS548978A JP S548978 A JPS548978 A JP S548978A JP 7519177 A JP7519177 A JP 7519177A JP 7519177 A JP7519177 A JP 7519177A JP S548978 A JPS548978 A JP S548978A
Authority
JP
Japan
Prior art keywords
mask
manufacture
photto
shielding film
breakdown
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7519177A
Other languages
Japanese (ja)
Inventor
Tatsuya Enomoto
Yuichi Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7519177A priority Critical patent/JPS548978A/en
Publication of JPS548978A publication Critical patent/JPS548978A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To manufacture a highly-precise photo mask with the breakdown of a shielding film prevented, by providing a concave through etching after ion-injecting by using a protective film on the shielding film as a mask.
COPYRIGHT: (C)1979,JPO&Japio
JP7519177A 1977-06-23 1977-06-23 Manufacture of photto mask Pending JPS548978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7519177A JPS548978A (en) 1977-06-23 1977-06-23 Manufacture of photto mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7519177A JPS548978A (en) 1977-06-23 1977-06-23 Manufacture of photto mask

Publications (1)

Publication Number Publication Date
JPS548978A true JPS548978A (en) 1979-01-23

Family

ID=13569050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7519177A Pending JPS548978A (en) 1977-06-23 1977-06-23 Manufacture of photto mask

Country Status (1)

Country Link
JP (1) JPS548978A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016018187A (en) * 2014-07-11 2016-02-01 株式会社ディスコ Method for producing exposure mask

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016018187A (en) * 2014-07-11 2016-02-01 株式会社ディスコ Method for producing exposure mask

Similar Documents

Publication Publication Date Title
JPS5431273A (en) Manufacture of semiconductor device
JPS5228875A (en) Mask
JPS5396674A (en) Photo mask
JPS5389688A (en) Semiconductor device
JPS5226191A (en) Package of photo-semiconductor element
JPS5222849A (en) Electronic lexicography
JPS548978A (en) Manufacture of photto mask
JPS5425169A (en) Matching method for photo mask against semiconductor wafer
JPS53116077A (en) Etching method
JPS5216981A (en) Integrate circuit unit
JPS52173A (en) X-ray etching mask
JPS522193A (en) Light warning device
JPS5421273A (en) Manufacture for photo mask
JPS51151073A (en) Method to adjust the position of an mask for an integrated circuit
JPS5431281A (en) Optical exposure mask
JPS525270A (en) Photo-mask
JPS5411672A (en) Manufacture for semiconductor device
JPS5220764A (en) Manufacturing system of mesa type semi-conductor unit
JPS5413269A (en) Forming method of two layer protective film
JPS5357973A (en) Preparation of photo mask
JPS52156568A (en) Photo mask
JPS548971A (en) Manufacture of semiconductor device
JPS5438118A (en) Projector
JPS5228874A (en) Mask holder
JPS5227275A (en) Glass mask holder