JPS5491092A - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPS5491092A JPS5491092A JP15837977A JP15837977A JPS5491092A JP S5491092 A JPS5491092 A JP S5491092A JP 15837977 A JP15837977 A JP 15837977A JP 15837977 A JP15837977 A JP 15837977A JP S5491092 A JPS5491092 A JP S5491092A
- Authority
- JP
- Japan
- Prior art keywords
- piq9
- electrode film
- impedance
- specific gravity
- equivalent circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To lower the impedance of an equivalent circuit, and to sumplify the manufacture of a vibrator by forming an electrode film of a light metal such as Al by using photoetching technique. CONSTITUTION:Both sides of crystal plate 9 are coated with heat-resisting resin PIQ9. Next, resin PIQ9 is removed except the part where an electrode is formed. On both the sides of crystal plate 9, metal film 8 of less than 2.69 in specific gravity such as Al is vapor-deposited. Then, the exposed crystal part is etched in plasma of freon gas. Next, Al films on PIQ9 and PIQ are removed at the same time and only the Al electrode film of the 1st layer is left. As for the piezoelectric vibrator manufactured in this way, since the specific gravity of its electrode film is small, the impedance of the equivalent circuit is low and the manufacture process is simple, so that its cost can be reduced.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15837977A JPS5491092A (en) | 1977-12-28 | 1977-12-28 | Piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15837977A JPS5491092A (en) | 1977-12-28 | 1977-12-28 | Piezoelectric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5491092A true JPS5491092A (en) | 1979-07-19 |
Family
ID=15670409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15837977A Pending JPS5491092A (en) | 1977-12-28 | 1977-12-28 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5491092A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6604266B1 (en) * | 1997-06-24 | 2003-08-12 | Tdk Corporation | Manufacturing method for a piezoelectric component |
| JP2004242254A (en) * | 2003-02-10 | 2004-08-26 | River Eletec Kk | Crystal vibrator and manufacturing method |
-
1977
- 1977-12-28 JP JP15837977A patent/JPS5491092A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6604266B1 (en) * | 1997-06-24 | 2003-08-12 | Tdk Corporation | Manufacturing method for a piezoelectric component |
| JP2004242254A (en) * | 2003-02-10 | 2004-08-26 | River Eletec Kk | Crystal vibrator and manufacturing method |
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