JPS5497375A - Cylindrical plasma processor - Google Patents

Cylindrical plasma processor

Info

Publication number
JPS5497375A
JPS5497375A JP491978A JP491978A JPS5497375A JP S5497375 A JPS5497375 A JP S5497375A JP 491978 A JP491978 A JP 491978A JP 491978 A JP491978 A JP 491978A JP S5497375 A JPS5497375 A JP S5497375A
Authority
JP
Japan
Prior art keywords
plasma processor
jig
cylindrical plasma
magnet
rotated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP491978A
Other languages
Japanese (ja)
Inventor
Hiroshi Koshimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP491978A priority Critical patent/JPS5497375A/en
Publication of JPS5497375A publication Critical patent/JPS5497375A/en
Pending legal-status Critical Current

Links

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  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To attain a uniform plasma process by turning a processed object.
CONSTITUTION: Jig 2 equipped with substrate 1 is supported by rotary jig 3 and rotated by magnet 6 of motor 5 and magnet 7 of jig 3. Consequently, substrate 1 is rotated in the circumferential direction to uniform upper and lower temperatures, so that uniform plasma processing can be done.
COPYRIGHT: (C)1979,JPO&Japio
JP491978A 1978-01-19 1978-01-19 Cylindrical plasma processor Pending JPS5497375A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP491978A JPS5497375A (en) 1978-01-19 1978-01-19 Cylindrical plasma processor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP491978A JPS5497375A (en) 1978-01-19 1978-01-19 Cylindrical plasma processor

Publications (1)

Publication Number Publication Date
JPS5497375A true JPS5497375A (en) 1979-08-01

Family

ID=11597017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP491978A Pending JPS5497375A (en) 1978-01-19 1978-01-19 Cylindrical plasma processor

Country Status (1)

Country Link
JP (1) JPS5497375A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59180426U (en) * 1983-05-18 1984-12-01 日本電気ホームエレクトロニクス株式会社 semiconductor manufacturing equipment
JPS60137021A (en) * 1983-12-26 1985-07-20 Toshiba Corp Plasma etching device
JPS6130236U (en) * 1984-07-26 1986-02-24 株式会社 プラズマシステム plasma processing equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59180426U (en) * 1983-05-18 1984-12-01 日本電気ホームエレクトロニクス株式会社 semiconductor manufacturing equipment
JPS60137021A (en) * 1983-12-26 1985-07-20 Toshiba Corp Plasma etching device
JPS6130236U (en) * 1984-07-26 1986-02-24 株式会社 プラズマシステム plasma processing equipment

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