JPS5498244A - Method of forming positive photo resist image - Google Patents

Method of forming positive photo resist image

Info

Publication number
JPS5498244A
JPS5498244A JP431978A JP431978A JPS5498244A JP S5498244 A JPS5498244 A JP S5498244A JP 431978 A JP431978 A JP 431978A JP 431978 A JP431978 A JP 431978A JP S5498244 A JPS5498244 A JP S5498244A
Authority
JP
Japan
Prior art keywords
photo resist
resist image
forming positive
positive photo
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP431978A
Other languages
Japanese (ja)
Other versions
JPS5635860B2 (en
Inventor
Tsuneo Yoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP431978A priority Critical patent/JPS5498244A/en
Publication of JPS5498244A publication Critical patent/JPS5498244A/en
Publication of JPS5635860B2 publication Critical patent/JPS5635860B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP431978A 1978-01-20 1978-01-20 Method of forming positive photo resist image Granted JPS5498244A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP431978A JPS5498244A (en) 1978-01-20 1978-01-20 Method of forming positive photo resist image

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP431978A JPS5498244A (en) 1978-01-20 1978-01-20 Method of forming positive photo resist image

Publications (2)

Publication Number Publication Date
JPS5498244A true JPS5498244A (en) 1979-08-03
JPS5635860B2 JPS5635860B2 (en) 1981-08-20

Family

ID=11581142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP431978A Granted JPS5498244A (en) 1978-01-20 1978-01-20 Method of forming positive photo resist image

Country Status (1)

Country Link
JP (1) JPS5498244A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60263143A (en) * 1984-06-01 1985-12-26 ローム　アンド　ハース　コンパニー Thermally stable copolymer image and formation thereof
JPS61212846A (en) * 1985-03-16 1986-09-20 Goou Kagaku Kogyo Kk Production of wiring board
JPS62170965A (en) * 1986-01-23 1987-07-28 Toray Ind Inc Photoengraving method for laminate for image formation
JPS63141048A (en) * 1986-10-23 1988-06-13 チバ　スペシャルティ　ケミカルズ　ホールディング　インコーポレーテッド Image formation
JPH02971A (en) * 1988-02-26 1990-01-05 Mitsubishi Electric Corp Formation of resist pattern

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49127615A (en) * 1973-04-07 1974-12-06
GB1492620A (en) * 1974-02-01 1977-11-23 Fuji Photo Film Co Ltd Ortho-quinonediazide light-sensitive copying material
JPS52150619A (en) * 1976-06-10 1977-12-14 Toray Industries Photosensitive resin composition

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49127615A (en) * 1973-04-07 1974-12-06
GB1492620A (en) * 1974-02-01 1977-11-23 Fuji Photo Film Co Ltd Ortho-quinonediazide light-sensitive copying material
JPS52150619A (en) * 1976-06-10 1977-12-14 Toray Industries Photosensitive resin composition

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60263143A (en) * 1984-06-01 1985-12-26 ローム　アンド　ハース　コンパニー Thermally stable copolymer image and formation thereof
JPS61212846A (en) * 1985-03-16 1986-09-20 Goou Kagaku Kogyo Kk Production of wiring board
JPS62170965A (en) * 1986-01-23 1987-07-28 Toray Ind Inc Photoengraving method for laminate for image formation
JPS63141048A (en) * 1986-10-23 1988-06-13 チバ　スペシャルティ　ケミカルズ　ホールディング　インコーポレーテッド Image formation
JPH02971A (en) * 1988-02-26 1990-01-05 Mitsubishi Electric Corp Formation of resist pattern

Also Published As

Publication number Publication date
JPS5635860B2 (en) 1981-08-20

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