JPS55101837A - Strain gauge type pressure measuring converter - Google Patents

Strain gauge type pressure measuring converter

Info

Publication number
JPS55101837A
JPS55101837A JP626780A JP626780A JPS55101837A JP S55101837 A JPS55101837 A JP S55101837A JP 626780 A JP626780 A JP 626780A JP 626780 A JP626780 A JP 626780A JP S55101837 A JPS55101837 A JP S55101837A
Authority
JP
Japan
Prior art keywords
strain gauge
pressure measuring
type pressure
gauge type
measuring converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP626780A
Other languages
Japanese (ja)
Other versions
JPS6016756B2 (en
Inventor
Kurauze Raina
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of JPS55101837A publication Critical patent/JPS55101837A/en
Publication of JPS6016756B2 publication Critical patent/JPS6016756B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP55006267A 1979-01-29 1980-01-22 Strain gauge pressure measurement transducer Expired JPS6016756B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19792903253 DE2903253C2 (en) 1979-01-29 1979-01-29 Pressure transmitter with a measuring membrane, preferably made of semiconductor material, and a strain gauge bridge circuit attached to it
DE2903253.9 1979-01-29

Publications (2)

Publication Number Publication Date
JPS55101837A true JPS55101837A (en) 1980-08-04
JPS6016756B2 JPS6016756B2 (en) 1985-04-27

Family

ID=6061605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55006267A Expired JPS6016756B2 (en) 1979-01-29 1980-01-22 Strain gauge pressure measurement transducer

Country Status (2)

Country Link
JP (1) JPS6016756B2 (en)
DE (1) DE2903253C2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59186376A (en) * 1983-04-06 1984-10-23 Hitachi Ltd pressure sensor
JPS6439075A (en) * 1987-08-05 1989-02-09 Nippon Denso Co Semiconductor pressure sensor and manufacture thereof
JPH0239574A (en) * 1988-07-29 1990-02-08 Nippon Denso Co Ltd Semiconductor pressure sensor
JP2023076912A (en) * 2021-11-24 2023-06-05 アズビル株式会社 pressure sensor

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2496261A1 (en) * 1980-12-12 1982-06-18 Commissariat Energie Atomique Pressure gauge with very rapid response - contg. strain gauges and usable at high temps. and pressures, esp. in nuclear power industry
DE8525588U1 (en) * 1985-09-07 1987-01-08 Robert Bosch Gmbh, 7000 Stuttgart Pressure sensor
DE3921050A1 (en) * 1989-06-27 1991-01-10 Fraunhofer Ges Forschung PLATE-SHAPED PRESSURE SENSOR
DE19914728B4 (en) * 1998-12-03 2004-10-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sensor assembly and manufacturing method
RU2327125C2 (en) * 2006-05-25 2008-06-20 Федеральное государственное унитарное предприятие Научно-исследовательский институт авиационного оборудования Sokolov's silicon micro-electromechanical converter

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59186376A (en) * 1983-04-06 1984-10-23 Hitachi Ltd pressure sensor
JPS6439075A (en) * 1987-08-05 1989-02-09 Nippon Denso Co Semiconductor pressure sensor and manufacture thereof
JPH0239574A (en) * 1988-07-29 1990-02-08 Nippon Denso Co Ltd Semiconductor pressure sensor
JP2023076912A (en) * 2021-11-24 2023-06-05 アズビル株式会社 pressure sensor

Also Published As

Publication number Publication date
DE2903253B1 (en) 1980-05-22
DE2903253C2 (en) 1981-02-05
JPS6016756B2 (en) 1985-04-27

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