JPS55102009A - Deceleration instructing method in positioning control - Google Patents
Deceleration instructing method in positioning controlInfo
- Publication number
- JPS55102009A JPS55102009A JP397679A JP397679A JPS55102009A JP S55102009 A JPS55102009 A JP S55102009A JP 397679 A JP397679 A JP 397679A JP 397679 A JP397679 A JP 397679A JP S55102009 A JPS55102009 A JP S55102009A
- Authority
- JP
- Japan
- Prior art keywords
- detector
- deceleration
- moving
- positioning
- moving distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 abstract 1
Landscapes
- Control Of Position Or Direction (AREA)
Abstract
PURPOSE: To enable the positioning control with best time efficiency, by adding a simple circuit not requiring adjustment and selection.
CONSTITUTION: The system is constituted by adding the 1/2 operation unit 13, setter 14, coincidence detection circuit 7'. The setter 14 with this constitution is set so that the deceleration start position Ld is a half the moving distance Lxo at start plus low speed moving distance Ll. Thus, the positioning start instruction operates the distance between the present position of the moving unit and the direction objective position, the absolute value Lxo for the value is preset at the preset subtraction counter 5, and the direction of movement is discriminated for the sign +, - with the direction discrimination circuit 11. The moving unit moves toward the objective with the end of setting. When the moving distance L at high speed moving is not smaller than 0, the detector 7 is operated and the coincidence detector 7' is operative after that. When L is not greater than 0, the detector 7 is operated and the detector 7' is operative. Accordingly, in either case, the deceleration instruction is made with the AND signal between the detectors 7 and 7', then the deceleration instruction having efficient positioning can be delivered.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP397679A JPS55102009A (en) | 1979-01-19 | 1979-01-19 | Deceleration instructing method in positioning control |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP397679A JPS55102009A (en) | 1979-01-19 | 1979-01-19 | Deceleration instructing method in positioning control |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55102009A true JPS55102009A (en) | 1980-08-04 |
| JPS6235126B2 JPS6235126B2 (en) | 1987-07-30 |
Family
ID=11572079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP397679A Granted JPS55102009A (en) | 1979-01-19 | 1979-01-19 | Deceleration instructing method in positioning control |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55102009A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57170525A (en) * | 1981-04-14 | 1982-10-20 | Nippon Telegr & Teleph Corp <Ntt> | Positioning control system for alignment stage |
| JPS57206926A (en) * | 1981-06-16 | 1982-12-18 | Nippon Telegr & Teleph Corp <Ntt> | Positioning method for stage |
| JPS62272308A (en) * | 1986-05-21 | 1987-11-26 | Nippon Telegr & Teleph Corp <Ntt> | Method for generating feed forward driving signal |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49121533A (en) * | 1973-03-22 | 1974-11-20 |
-
1979
- 1979-01-19 JP JP397679A patent/JPS55102009A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49121533A (en) * | 1973-03-22 | 1974-11-20 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57170525A (en) * | 1981-04-14 | 1982-10-20 | Nippon Telegr & Teleph Corp <Ntt> | Positioning control system for alignment stage |
| JPS57206926A (en) * | 1981-06-16 | 1982-12-18 | Nippon Telegr & Teleph Corp <Ntt> | Positioning method for stage |
| JPS62272308A (en) * | 1986-05-21 | 1987-11-26 | Nippon Telegr & Teleph Corp <Ntt> | Method for generating feed forward driving signal |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6235126B2 (en) | 1987-07-30 |
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