JPS5510507A - Test transfer device - Google Patents

Test transfer device

Info

Publication number
JPS5510507A
JPS5510507A JP8251378A JP8251378A JPS5510507A JP S5510507 A JPS5510507 A JP S5510507A JP 8251378 A JP8251378 A JP 8251378A JP 8251378 A JP8251378 A JP 8251378A JP S5510507 A JPS5510507 A JP S5510507A
Authority
JP
Japan
Prior art keywords
sample
stage
chuck
air
air layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8251378A
Other languages
Japanese (ja)
Other versions
JPS6019145B2 (en
Inventor
Tadao Saito
Hideo Watanabe
Nobuya Shinoyama
Hisao Izawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
NTT Inc
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Telegraph and Telephone Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Telegraph and Telephone Corp, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP8251378A priority Critical patent/JPS6019145B2/en
Publication of JPS5510507A publication Critical patent/JPS5510507A/en
Publication of JPS6019145B2 publication Critical patent/JPS6019145B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To ensure an accurate positioning and thus to secure an accurate transfer of the sample by holding the sample on the stage via the air layer featuring a microspace for observation through the microscope.
CONSTITUTION: Sample 101 is adsorbed to chuck 104 and then carried onto stage 102 via arm 112 to stand still with the micro air layer formed between the lower surface of sample 101 and the upper surface of stage 102 by the air supplied through air inlet 103'. Under these conditions, the positioning is caried out by moving stage 111 and while observing mark 107 on the surface of the sample via microscope 113 and through window 106 of chuck 104. When the air jetting through inlet 103' is stopped, the air layer disappears. And thus sample 101 is pressed onto the surface of stage 102. Then adsorption of chuck 104 is released, and chuck 104 is raised up by loosening pressing metal 108. Thus, the transfer completes for sample 101.
COPYRIGHT: (C)1980,JPO&Japio
JP8251378A 1978-07-08 1978-07-08 Sample delivery device Expired JPS6019145B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8251378A JPS6019145B2 (en) 1978-07-08 1978-07-08 Sample delivery device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8251378A JPS6019145B2 (en) 1978-07-08 1978-07-08 Sample delivery device

Publications (2)

Publication Number Publication Date
JPS5510507A true JPS5510507A (en) 1980-01-25
JPS6019145B2 JPS6019145B2 (en) 1985-05-14

Family

ID=13776595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8251378A Expired JPS6019145B2 (en) 1978-07-08 1978-07-08 Sample delivery device

Country Status (1)

Country Link
JP (1) JPS6019145B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5715434A (en) * 1980-06-30 1982-01-26 Mitsubishi Electric Corp Bonding apparatus
JPS5880847A (en) * 1981-11-02 1983-05-16 ジヨセフ・クバトロニツク Matrix test head unit and miniature circuit processing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5715434A (en) * 1980-06-30 1982-01-26 Mitsubishi Electric Corp Bonding apparatus
JPS5880847A (en) * 1981-11-02 1983-05-16 ジヨセフ・クバトロニツク Matrix test head unit and miniature circuit processing device

Also Published As

Publication number Publication date
JPS6019145B2 (en) 1985-05-14

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