JPS55110250A - Vacuum contact printer - Google Patents

Vacuum contact printer

Info

Publication number
JPS55110250A
JPS55110250A JP1863379A JP1863379A JPS55110250A JP S55110250 A JPS55110250 A JP S55110250A JP 1863379 A JP1863379 A JP 1863379A JP 1863379 A JP1863379 A JP 1863379A JP S55110250 A JPS55110250 A JP S55110250A
Authority
JP
Japan
Prior art keywords
pressure
sheet
vacuum
5komega
abnormality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1863379A
Other languages
Japanese (ja)
Inventor
Tsuneo Yoshida
Kazuo Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1863379A priority Critical patent/JPS55110250A/en
Publication of JPS55110250A publication Critical patent/JPS55110250A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To enable abnormality of the sheet and packing of a vacuum contact printer to be detected by providing the function of a pressure sensitive element to part of a member forming the vacuum chamber. CONSTITUTION:Plate 1 and photosensitive substrate 2 are vacuum contacted, and it is confirmed that there is no abnormality causing leakage of air into vacuum chamber 11. At this time, sheet 7 is being pressed by a force of 1.0kg/cm<2> or more due to atmos pheric pressure, and it has been provided with a pressure sensitive element whose electric resistance is changed suddenly and susceptibly from 10MOMEGA or more to 5kOMEGA or less by the pressure. In case abnormality causing leakage of air into chamber 11 occurs, a pressure lower than the normal pressure is applied to sheet 7. As a resutl, the electric resistance of sheet 7 does not lower to 5kOMEGA or less, so by reading the indicator of ammeter 16 an insufficient contact state can be detected.
JP1863379A 1979-02-19 1979-02-19 Vacuum contact printer Pending JPS55110250A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1863379A JPS55110250A (en) 1979-02-19 1979-02-19 Vacuum contact printer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1863379A JPS55110250A (en) 1979-02-19 1979-02-19 Vacuum contact printer

Publications (1)

Publication Number Publication Date
JPS55110250A true JPS55110250A (en) 1980-08-25

Family

ID=11977010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1863379A Pending JPS55110250A (en) 1979-02-19 1979-02-19 Vacuum contact printer

Country Status (1)

Country Link
JP (1) JPS55110250A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09127703A (en) * 1995-10-31 1997-05-16 Nec Toyama Ltd Exposure device for printed circuit board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09127703A (en) * 1995-10-31 1997-05-16 Nec Toyama Ltd Exposure device for printed circuit board

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