JPS55112761A - Dry type cutting method - Google Patents

Dry type cutting method

Info

Publication number
JPS55112761A
JPS55112761A JP1871579A JP1871579A JPS55112761A JP S55112761 A JPS55112761 A JP S55112761A JP 1871579 A JP1871579 A JP 1871579A JP 1871579 A JP1871579 A JP 1871579A JP S55112761 A JPS55112761 A JP S55112761A
Authority
JP
Japan
Prior art keywords
cutting
dry type
silicon wafer
cutting method
cutting position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1871579A
Other languages
Japanese (ja)
Other versions
JPS6362339B2 (en
Inventor
Mitsuo Sekiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Abrasive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Abrasive Systems Ltd filed Critical Disco Abrasive Systems Ltd
Priority to JP1871579A priority Critical patent/JPS55112761A/en
Publication of JPS55112761A publication Critical patent/JPS55112761A/en
Publication of JPS6362339B2 publication Critical patent/JPS6362339B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

PURPOSE:To cut a work, such as a silicon wafer, by a dry type grinding wheel by blowing an inert gas against the work at the cutting position. CONSTITUTION:Cooled and vaporized nitrogne gas is blown through a nozzle 6 against the cutting position. The jet of nitrogen gas eliminates oxygen and cools the working cutting edge of the griding wheel 3 and the silicon wafer 1 at the cutting position so that the silicon wafer 1 is cut by the grinding wheel 3 in the dry state. The cutting device of this dry type cutting method is applicable to a variety of cutting purposes and capable of severing works having considerable thickness.
JP1871579A 1979-02-20 1979-02-20 Dry type cutting method Granted JPS55112761A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1871579A JPS55112761A (en) 1979-02-20 1979-02-20 Dry type cutting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1871579A JPS55112761A (en) 1979-02-20 1979-02-20 Dry type cutting method

Publications (2)

Publication Number Publication Date
JPS55112761A true JPS55112761A (en) 1980-08-30
JPS6362339B2 JPS6362339B2 (en) 1988-12-02

Family

ID=11979346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1871579A Granted JPS55112761A (en) 1979-02-20 1979-02-20 Dry type cutting method

Country Status (1)

Country Link
JP (1) JPS55112761A (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111622A (en) * 1980-02-06 1981-09-03 Tokyo Shibaura Electric Co Blade dieing device
JPS57203553U (en) * 1981-06-23 1982-12-24
JPS58426U (en) * 1981-06-25 1983-01-05 日本電気ホームエレクトロニクス株式会社 dicing equipment
JPS63256319A (en) * 1987-04-11 1988-10-24 Nippon Jiryoku Senko Kk Manufacture of short metal filament
WO1991008092A1 (en) * 1989-11-29 1991-06-13 Wolfgang Lehner Process and installation for producing large, thin, surface-treated slabs of natural stone without using floating effluent coolants
JPH0760621A (en) * 1993-08-26 1995-03-07 Yamaguchi Pref Gov Dry grinding work method and device
WO2004087376A1 (en) * 2003-04-01 2004-10-14 Unova U.K. Limited Workpiece cooling during grinding
DE102009040665A1 (en) * 2009-09-09 2011-03-10 HK Präzisionstechnik GmbH Method and separation system with apparatus for separating processing of crystalline materials
US20120198671A1 (en) * 2011-02-07 2012-08-09 Moshe Israel Meidar Machining device for machining crankshafts and a machining system having such a machining device
US8316557B2 (en) * 2006-10-04 2012-11-27 Varco I/P, Inc. Reclamation of components of wellbore cuttings material
JP2013071871A (en) * 2011-09-28 2013-04-22 Mitsuboshi Diamond Industrial Co Ltd Scribing device
CN103102065A (en) * 2011-09-28 2013-05-15 三星钻石工业股份有限公司 Scribing apparatus
US9073104B2 (en) 2008-08-14 2015-07-07 National Oilwell Varco, L.P. Drill cuttings treatment systems
US9079222B2 (en) 2008-10-10 2015-07-14 National Oilwell Varco, L.P. Shale shaker
US9643111B2 (en) 2013-03-08 2017-05-09 National Oilwell Varco, L.P. Vector maximizing screen
US9677353B2 (en) 2008-10-10 2017-06-13 National Oilwell Varco, L.P. Shale shakers with selective series/parallel flow path conversion

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0418265A (en) * 1990-05-02 1992-01-22 Ninben:Kk Beverage pack containing choice beverage raw material
JPH0418266A (en) * 1990-05-12 1992-01-22 Ninben:Kk Liquid pack containing beverage raw material

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2182952A (en) * 1938-04-30 1939-12-12 Hanson Van Winkle Munning Co Air conditioned buffing and polishing system
US2635399A (en) * 1951-04-19 1953-04-21 Thompson Prod Inc Method for grinding carbide tools
JPS5128754A (en) * 1974-09-04 1976-03-11 Hitachi Ltd

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2182952A (en) * 1938-04-30 1939-12-12 Hanson Van Winkle Munning Co Air conditioned buffing and polishing system
US2635399A (en) * 1951-04-19 1953-04-21 Thompson Prod Inc Method for grinding carbide tools
JPS5128754A (en) * 1974-09-04 1976-03-11 Hitachi Ltd

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111622A (en) * 1980-02-06 1981-09-03 Tokyo Shibaura Electric Co Blade dieing device
JPS57203553U (en) * 1981-06-23 1982-12-24
JPS58426U (en) * 1981-06-25 1983-01-05 日本電気ホームエレクトロニクス株式会社 dicing equipment
JPS63256319A (en) * 1987-04-11 1988-10-24 Nippon Jiryoku Senko Kk Manufacture of short metal filament
WO1991008092A1 (en) * 1989-11-29 1991-06-13 Wolfgang Lehner Process and installation for producing large, thin, surface-treated slabs of natural stone without using floating effluent coolants
JPH0760621A (en) * 1993-08-26 1995-03-07 Yamaguchi Pref Gov Dry grinding work method and device
WO2004087376A1 (en) * 2003-04-01 2004-10-14 Unova U.K. Limited Workpiece cooling during grinding
US8316557B2 (en) * 2006-10-04 2012-11-27 Varco I/P, Inc. Reclamation of components of wellbore cuttings material
US9073104B2 (en) 2008-08-14 2015-07-07 National Oilwell Varco, L.P. Drill cuttings treatment systems
US9079222B2 (en) 2008-10-10 2015-07-14 National Oilwell Varco, L.P. Shale shaker
US9677353B2 (en) 2008-10-10 2017-06-13 National Oilwell Varco, L.P. Shale shakers with selective series/parallel flow path conversion
DE102009040665B4 (en) * 2009-09-09 2012-08-30 HK Präzisionstechnik GmbH Method and separation system with apparatus for separating processing of crystalline materials
DE102009040665A1 (en) * 2009-09-09 2011-03-10 HK Präzisionstechnik GmbH Method and separation system with apparatus for separating processing of crystalline materials
US20120198671A1 (en) * 2011-02-07 2012-08-09 Moshe Israel Meidar Machining device for machining crankshafts and a machining system having such a machining device
US8881352B2 (en) * 2011-02-07 2014-11-11 Moshe Israel Meidar Machining device for machining crankshafts and a machining system having such a machining device
JP2013071871A (en) * 2011-09-28 2013-04-22 Mitsuboshi Diamond Industrial Co Ltd Scribing device
CN103102065A (en) * 2011-09-28 2013-05-15 三星钻石工业股份有限公司 Scribing apparatus
TWI483911B (en) * 2011-09-28 2015-05-11 Mitsuboshi Diamond Ind Co Ltd Scribing apparatus
US9643111B2 (en) 2013-03-08 2017-05-09 National Oilwell Varco, L.P. Vector maximizing screen
US10556196B2 (en) 2013-03-08 2020-02-11 National Oilwell Varco, L.P. Vector maximizing screen

Also Published As

Publication number Publication date
JPS6362339B2 (en) 1988-12-02

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