JPS5511384A - Inspection during dicing and system therefor - Google Patents

Inspection during dicing and system therefor

Info

Publication number
JPS5511384A
JPS5511384A JP8471178A JP8471178A JPS5511384A JP S5511384 A JPS5511384 A JP S5511384A JP 8471178 A JP8471178 A JP 8471178A JP 8471178 A JP8471178 A JP 8471178A JP S5511384 A JPS5511384 A JP S5511384A
Authority
JP
Japan
Prior art keywords
cutting
jig
pellets
system therefor
during dicing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8471178A
Other languages
Japanese (ja)
Inventor
Masao Hino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8471178A priority Critical patent/JPS5511384A/en
Publication of JPS5511384A publication Critical patent/JPS5511384A/en
Pending legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)

Abstract

PURPOSE: To observe cutting while keeping a wafer fastening jig kept on a cutter.
CONSTITUTION: A wafer 3 is sticked on a transparent fastening jig 1 and cut into pellets 4. Said jig 1 is adsorbed due to vacuum, and an illuminating light source 6 is placed below a holder 5. The light from said light source 6 reachs a microscope 7 through said jig and the cutting clearances between said pellets 4. The image 8 of said microscope is such that said cutting grooves and pellets appear bright and dark respectively and the grooves whose cutting is not complete appears dark.
COPYRIGHT: (C)1980,JPO&Japio
JP8471178A 1978-07-11 1978-07-11 Inspection during dicing and system therefor Pending JPS5511384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8471178A JPS5511384A (en) 1978-07-11 1978-07-11 Inspection during dicing and system therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8471178A JPS5511384A (en) 1978-07-11 1978-07-11 Inspection during dicing and system therefor

Publications (1)

Publication Number Publication Date
JPS5511384A true JPS5511384A (en) 1980-01-26

Family

ID=13838238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8471178A Pending JPS5511384A (en) 1978-07-11 1978-07-11 Inspection during dicing and system therefor

Country Status (1)

Country Link
JP (1) JPS5511384A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005048340A1 (en) * 2003-11-16 2005-05-26 Advanced Dicing Technologies Ltd. Vacuum chuck

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS524178A (en) * 1975-06-27 1977-01-13 Nec Corp Small object automatic positioning apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS524178A (en) * 1975-06-27 1977-01-13 Nec Corp Small object automatic positioning apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005048340A1 (en) * 2003-11-16 2005-05-26 Advanced Dicing Technologies Ltd. Vacuum chuck

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