JPS5512733B2 - - Google Patents
Info
- Publication number
- JPS5512733B2 JPS5512733B2 JP15653376A JP15653376A JPS5512733B2 JP S5512733 B2 JPS5512733 B2 JP S5512733B2 JP 15653376 A JP15653376 A JP 15653376A JP 15653376 A JP15653376 A JP 15653376A JP S5512733 B2 JPS5512733 B2 JP S5512733B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15653376A JPS5381069A (en) | 1976-12-27 | 1976-12-27 | Production of susceptor in cvd device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15653376A JPS5381069A (en) | 1976-12-27 | 1976-12-27 | Production of susceptor in cvd device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5381069A JPS5381069A (en) | 1978-07-18 |
| JPS5512733B2 true JPS5512733B2 (ja) | 1980-04-03 |
Family
ID=15629863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15653376A Granted JPS5381069A (en) | 1976-12-27 | 1976-12-27 | Production of susceptor in cvd device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5381069A (ja) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5919286Y2 (ja) * | 1979-11-06 | 1984-06-04 | 株式会社 石井幹子デザイン事務所 | シヤンデリア用装飾反射部材係止具 |
| US4499354A (en) * | 1982-10-06 | 1985-02-12 | General Instrument Corp. | Susceptor for radiant absorption heater system |
| JPS63186422A (ja) * | 1987-01-28 | 1988-08-02 | Tadahiro Omi | ウエハサセプタ装置 |
| CN111235633A (zh) * | 2020-01-16 | 2020-06-05 | 中国科学院半导体研究所 | 一种在硅熔体表面通过cvd制备自支撑碳化硅晶圆的方法 |
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1976
- 1976-12-27 JP JP15653376A patent/JPS5381069A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5381069A (en) | 1978-07-18 |