JPS5512902A - Unity-magnification copying lens having resolution power of refraction limit - Google Patents

Unity-magnification copying lens having resolution power of refraction limit

Info

Publication number
JPS5512902A
JPS5512902A JP7392778A JP7392778A JPS5512902A JP S5512902 A JPS5512902 A JP S5512902A JP 7392778 A JP7392778 A JP 7392778A JP 7392778 A JP7392778 A JP 7392778A JP S5512902 A JPS5512902 A JP S5512902A
Authority
JP
Japan
Prior art keywords
refraction
lenses
factor
groups
planes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7392778A
Other languages
English (en)
Other versions
JPS581763B2 (ja
Inventor
Koichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentax Corp
Original Assignee
Asahi Kogaku Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kogaku Kogyo Co Ltd filed Critical Asahi Kogaku Kogyo Co Ltd
Priority to JP7392778A priority Critical patent/JPS581763B2/ja
Publication of JPS5512902A publication Critical patent/JPS5512902A/ja
Publication of JPS581763B2 publication Critical patent/JPS581763B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Lenses (AREA)
JP7392778A 1978-06-19 1978-06-19 回折限界の解像力を有する等倍複写用レンズ Expired JPS581763B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7392778A JPS581763B2 (ja) 1978-06-19 1978-06-19 回折限界の解像力を有する等倍複写用レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7392778A JPS581763B2 (ja) 1978-06-19 1978-06-19 回折限界の解像力を有する等倍複写用レンズ

Publications (2)

Publication Number Publication Date
JPS5512902A true JPS5512902A (en) 1980-01-29
JPS581763B2 JPS581763B2 (ja) 1983-01-12

Family

ID=13532253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7392778A Expired JPS581763B2 (ja) 1978-06-19 1978-06-19 回折限界の解像力を有する等倍複写用レンズ

Country Status (1)

Country Link
JP (1) JPS581763B2 (ja)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5831776A (en) * 1993-11-15 1998-11-03 Nikon Corporation Projection optical system and projection exposure apparatus
US5835285A (en) * 1995-01-06 1998-11-10 Nikon Corporation Projection optical system and exposure apparatus using the same
US5903400A (en) * 1996-08-08 1999-05-11 Nikon Corporation Projection-optical system for use in a projection-exposure apparatus
US5930049A (en) * 1996-10-01 1999-07-27 Nikon Corporation Projection optical system and method of using such system for manufacturing devices
US5943172A (en) * 1993-11-15 1999-08-24 Nikon Corporation Projection optical system and projection exposure apparatus
US6008884A (en) * 1997-04-25 1999-12-28 Nikon Corporation Projection lens system and apparatus
US6104544A (en) * 1994-12-14 2000-08-15 Nikon Corporation Exposure apparatus
US6259508B1 (en) 1998-01-22 2001-07-10 Nikon Corporation Projection optical system and exposure apparatus and method
US6333781B1 (en) 1997-07-24 2001-12-25 Nikon Corporation Projection optical system and exposure apparatus and method
USRE38403E1 (en) 1994-11-10 2004-01-27 Nikon Corporation Projection optical system and projection exposure apparatus
US6700645B1 (en) 1998-01-22 2004-03-02 Nikon Corporation Projection optical system and exposure apparatus and method
USRE38465E1 (en) 1994-12-14 2004-03-16 Nikon Corporation Exposure apparatus
JP6279178B1 (ja) * 2016-05-20 2018-02-14 オリンパス株式会社 リレー光学系及びそれを備えた硬性鏡

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5831776A (en) * 1993-11-15 1998-11-03 Nikon Corporation Projection optical system and projection exposure apparatus
US5943172A (en) * 1993-11-15 1999-08-24 Nikon Corporation Projection optical system and projection exposure apparatus
USRE38403E1 (en) 1994-11-10 2004-01-27 Nikon Corporation Projection optical system and projection exposure apparatus
US6104544A (en) * 1994-12-14 2000-08-15 Nikon Corporation Exposure apparatus
USRE38465E1 (en) 1994-12-14 2004-03-16 Nikon Corporation Exposure apparatus
USRE37846E1 (en) * 1995-01-06 2002-09-17 Nikon Corporation Projection optical system and exposure apparatus using the same
US5835285A (en) * 1995-01-06 1998-11-10 Nikon Corporation Projection optical system and exposure apparatus using the same
US5903400A (en) * 1996-08-08 1999-05-11 Nikon Corporation Projection-optical system for use in a projection-exposure apparatus
US5930049A (en) * 1996-10-01 1999-07-27 Nikon Corporation Projection optical system and method of using such system for manufacturing devices
US6008884A (en) * 1997-04-25 1999-12-28 Nikon Corporation Projection lens system and apparatus
US6333781B1 (en) 1997-07-24 2001-12-25 Nikon Corporation Projection optical system and exposure apparatus and method
US6259508B1 (en) 1998-01-22 2001-07-10 Nikon Corporation Projection optical system and exposure apparatus and method
US6700645B1 (en) 1998-01-22 2004-03-02 Nikon Corporation Projection optical system and exposure apparatus and method
JP6279178B1 (ja) * 2016-05-20 2018-02-14 オリンパス株式会社 リレー光学系及びそれを備えた硬性鏡

Also Published As

Publication number Publication date
JPS581763B2 (ja) 1983-01-12

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