JPS5512902A - Unity-magnification copying lens having resolution power of refraction limit - Google Patents

Unity-magnification copying lens having resolution power of refraction limit

Info

Publication number
JPS5512902A
JPS5512902A JP7392778A JP7392778A JPS5512902A JP S5512902 A JPS5512902 A JP S5512902A JP 7392778 A JP7392778 A JP 7392778A JP 7392778 A JP7392778 A JP 7392778A JP S5512902 A JPS5512902 A JP S5512902A
Authority
JP
Japan
Prior art keywords
refraction
lenses
factor
groups
planes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7392778A
Other languages
Japanese (ja)
Other versions
JPS581763B2 (en
Inventor
Koichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentax Corp
Original Assignee
Asahi Kogaku Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kogaku Kogyo Co Ltd filed Critical Asahi Kogaku Kogyo Co Ltd
Priority to JP7392778A priority Critical patent/JPS581763B2/en
Publication of JPS5512902A publication Critical patent/JPS5512902A/en
Publication of JPS581763B2 publication Critical patent/JPS581763B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Lenses (AREA)

Abstract

PURPOSE: To obtain resolution power of a refraction limit with aberration being compensated extremely minutely, by satisfying the specified condition by the use of 14 groups of 18 lenses with the refraction planes being arranged so that a focus forms a symmetricale plane.
CONSTITUTION: An optical system is formed by the use of 14 groups of 18 lenses, which are divided into 7-front groups of 9 lenses and 7-rear groups of 9 lenses, with the refraction planes being arranged so that a focus 100 forms a symmetrical plane. In the case where the focus distance of the entire system is 171.0835, a numerical aperture is 0.164, and the image hight is 25; and where r is curvature radius of the refraction planes, d is the distance between the refraction planes, N is the refraction rate of the glass spectrum g, and υ is Abbe's number, the dimensions of the lenses are specified as shown in the Table in the Figure. This configuration results in unitylens magnification, and near zero values of a spherical aberration factor, a coma factor, an astigmatism factor, and distortion aberration factor, and of Petzval's factor. Then, a unity-magnification lens having resolution power of a refraction limit, that is an excellent copy lens for non-contact printing in manufacturing ICs can be obtained.
COPYRIGHT: (C)1980,JPO&Japio
JP7392778A 1978-06-19 1978-06-19 1-magnification copying lens with diffraction-limited resolution Expired JPS581763B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7392778A JPS581763B2 (en) 1978-06-19 1978-06-19 1-magnification copying lens with diffraction-limited resolution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7392778A JPS581763B2 (en) 1978-06-19 1978-06-19 1-magnification copying lens with diffraction-limited resolution

Publications (2)

Publication Number Publication Date
JPS5512902A true JPS5512902A (en) 1980-01-29
JPS581763B2 JPS581763B2 (en) 1983-01-12

Family

ID=13532253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7392778A Expired JPS581763B2 (en) 1978-06-19 1978-06-19 1-magnification copying lens with diffraction-limited resolution

Country Status (1)

Country Link
JP (1) JPS581763B2 (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5831776A (en) * 1993-11-15 1998-11-03 Nikon Corporation Projection optical system and projection exposure apparatus
US5835285A (en) * 1995-01-06 1998-11-10 Nikon Corporation Projection optical system and exposure apparatus using the same
US5903400A (en) * 1996-08-08 1999-05-11 Nikon Corporation Projection-optical system for use in a projection-exposure apparatus
US5930049A (en) * 1996-10-01 1999-07-27 Nikon Corporation Projection optical system and method of using such system for manufacturing devices
US5943172A (en) * 1993-11-15 1999-08-24 Nikon Corporation Projection optical system and projection exposure apparatus
US6008884A (en) * 1997-04-25 1999-12-28 Nikon Corporation Projection lens system and apparatus
US6104544A (en) * 1994-12-14 2000-08-15 Nikon Corporation Exposure apparatus
US6259508B1 (en) 1998-01-22 2001-07-10 Nikon Corporation Projection optical system and exposure apparatus and method
US6333781B1 (en) 1997-07-24 2001-12-25 Nikon Corporation Projection optical system and exposure apparatus and method
USRE38403E1 (en) 1994-11-10 2004-01-27 Nikon Corporation Projection optical system and projection exposure apparatus
US6700645B1 (en) 1998-01-22 2004-03-02 Nikon Corporation Projection optical system and exposure apparatus and method
USRE38465E1 (en) 1994-12-14 2004-03-16 Nikon Corporation Exposure apparatus
JP6279178B1 (en) * 2016-05-20 2018-02-14 オリンパス株式会社 Relay optical system and rigid mirror having the same

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5831776A (en) * 1993-11-15 1998-11-03 Nikon Corporation Projection optical system and projection exposure apparatus
US5943172A (en) * 1993-11-15 1999-08-24 Nikon Corporation Projection optical system and projection exposure apparatus
USRE38403E1 (en) 1994-11-10 2004-01-27 Nikon Corporation Projection optical system and projection exposure apparatus
US6104544A (en) * 1994-12-14 2000-08-15 Nikon Corporation Exposure apparatus
USRE38465E1 (en) 1994-12-14 2004-03-16 Nikon Corporation Exposure apparatus
USRE37846E1 (en) * 1995-01-06 2002-09-17 Nikon Corporation Projection optical system and exposure apparatus using the same
US5835285A (en) * 1995-01-06 1998-11-10 Nikon Corporation Projection optical system and exposure apparatus using the same
US5903400A (en) * 1996-08-08 1999-05-11 Nikon Corporation Projection-optical system for use in a projection-exposure apparatus
US5930049A (en) * 1996-10-01 1999-07-27 Nikon Corporation Projection optical system and method of using such system for manufacturing devices
US6008884A (en) * 1997-04-25 1999-12-28 Nikon Corporation Projection lens system and apparatus
US6333781B1 (en) 1997-07-24 2001-12-25 Nikon Corporation Projection optical system and exposure apparatus and method
US6259508B1 (en) 1998-01-22 2001-07-10 Nikon Corporation Projection optical system and exposure apparatus and method
US6700645B1 (en) 1998-01-22 2004-03-02 Nikon Corporation Projection optical system and exposure apparatus and method
JP6279178B1 (en) * 2016-05-20 2018-02-14 オリンパス株式会社 Relay optical system and rigid mirror having the same

Also Published As

Publication number Publication date
JPS581763B2 (en) 1983-01-12

Similar Documents

Publication Publication Date Title
JPS57201213A (en) Microminiature zoom lens
JPS6457222A (en) Zoom lens for compact camera
JPS5512902A (en) Unity-magnification copying lens having resolution power of refraction limit
JPS5659217A (en) Lens for compact camera of short overall length using aspherical face
JPS57190917A (en) Superwide-angle zoom lens
JPS5449132A (en) Wide angle lens of retrofocus type
US3910685A (en) Three element objective lens with aspheres on rear surfaces of first and second elements
JPH0373909U (en)
US4359272A (en) Internal focusing telephoto lens
JPS5451826A (en) Photographic lens
JPS54158225A (en) Photographic lens having long back focus and large aperture ratio
JPS6132651B2 (en)
JPS6425113A (en) Finite system large aperture single lens
JPS6131847B2 (en)
US3545845A (en) Compact wide angle objective lens system with long back focal length
CN103631012B (en) There is the zoom eyepiece of Glass aspheric
US3958865A (en) Retrofocus type lens system
JPS5443725A (en) Standard photographic lens
JPS5443755A (en) Reproducing lens for video disc
JPS54147035A (en) Tessar type photographic lens placed behind aperture
Wynne New wide-aperture cata-dioptric systems
JPS5639513A (en) Rear attachment lens
JPS55100519A (en) Photographic telephoto lens
US2807983A (en) Five component high speed objective of modified gaussian type
JPS5461920A (en) Rear aperture large aperture photographic lens