JPS55146932A - Specimen-exchanging device in electronic beam depicting device - Google Patents

Specimen-exchanging device in electronic beam depicting device

Info

Publication number
JPS55146932A
JPS55146932A JP5421979A JP5421979A JPS55146932A JP S55146932 A JPS55146932 A JP S55146932A JP 5421979 A JP5421979 A JP 5421979A JP 5421979 A JP5421979 A JP 5421979A JP S55146932 A JPS55146932 A JP S55146932A
Authority
JP
Japan
Prior art keywords
cassette
valve
chamber
imaging
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5421979A
Other languages
Japanese (ja)
Inventor
Yoshimasa Unno
Shinjiro Katagiri
Teiji Katsuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5421979A priority Critical patent/JPS55146932A/en
Publication of JPS55146932A publication Critical patent/JPS55146932A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To achieve improvement of operating efficiency, by equipping an electronic image depicting device with a takeout chamber so that any imaging-completed specimen can be cured in a vacuum container and freely taken out to outside of vacuum chamber while keeping its vacuum as it is. CONSTITUTION:Specimen is kept in a cassette 9, the cassette is put into a magazine 8 and placed on a table 5, and it's top is closed for evacuation. By opening a valve 6 and making adjustment of position of the table 5, the cassette is shifted from a vacuum container 4 over to a transfer table 2 in chamber 1 and a valve 7 is closed to enable imaging to be executed. After the execution of imaging, the valve 7 is opened and the cassette is pulled back toward the magazine 8, and the next cassette is processed. After evacuation of a takeout chamber 12, a valve 18 is opened, the table 5's position is adjusted, the cassette is pulled out by a rod 16 and led onto a receiving unit of cassette feeding units 14a and 14b in the takeout chamber. By turning of a knob 15, the cassette 9 is moved upwardly, and by repetition of pullout, turning and push-up actions, the cassettes are collected by a receiving box 13 in turn. It is possible in this manner to efficiency take out processing-completed cassettes keeping pace up with imaging and curing processes.
JP5421979A 1979-05-04 1979-05-04 Specimen-exchanging device in electronic beam depicting device Pending JPS55146932A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5421979A JPS55146932A (en) 1979-05-04 1979-05-04 Specimen-exchanging device in electronic beam depicting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5421979A JPS55146932A (en) 1979-05-04 1979-05-04 Specimen-exchanging device in electronic beam depicting device

Publications (1)

Publication Number Publication Date
JPS55146932A true JPS55146932A (en) 1980-11-15

Family

ID=12964423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5421979A Pending JPS55146932A (en) 1979-05-04 1979-05-04 Specimen-exchanging device in electronic beam depicting device

Country Status (1)

Country Link
JP (1) JPS55146932A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4508968A (en) * 1980-12-12 1985-04-02 Fujitsu Limited Apparatus for processing negative photoresist
JPS618861U (en) * 1984-06-22 1986-01-20 曙ブレーキ工業株式会社 Friction material testing equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236986B2 (en) * 1972-03-15 1977-09-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236986B2 (en) * 1972-03-15 1977-09-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4508968A (en) * 1980-12-12 1985-04-02 Fujitsu Limited Apparatus for processing negative photoresist
JPS618861U (en) * 1984-06-22 1986-01-20 曙ブレーキ工業株式会社 Friction material testing equipment

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