JPS5515073A - Light intensity fluctuation correcting unit - Google Patents

Light intensity fluctuation correcting unit

Info

Publication number
JPS5515073A
JPS5515073A JP8861278A JP8861278A JPS5515073A JP S5515073 A JPS5515073 A JP S5515073A JP 8861278 A JP8861278 A JP 8861278A JP 8861278 A JP8861278 A JP 8861278A JP S5515073 A JPS5515073 A JP S5515073A
Authority
JP
Japan
Prior art keywords
light
monitor
optical system
photoelectric conversion
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8861278A
Other languages
Japanese (ja)
Other versions
JPS6031250B2 (en
Inventor
Takeshi Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP8861278A priority Critical patent/JPS6031250B2/en
Publication of JPS5515073A publication Critical patent/JPS5515073A/en
Publication of JPS6031250B2 publication Critical patent/JPS6031250B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
    • G01J1/1626—Arrangements with two photodetectors, the signals of which are compared

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

PURPOSE:To eliminate the measurement error dependent upon intensity fluctuation of a measured light caused by a light source or the optical system, by controlling the correcting circuit for monitor so that the output of this circuit and reference signals may have a fixed relation. CONSTITUTION:The laser light from laser 1 is radiated through deflection element 3 and light path splitter 5. A measuring light is projected to IC mask 9 as a measlred object through focusing optical system 7. The light which passed through IC mask 9 is incident onto measuring photoelectric conversion element 13 and is converted photoelectrically. The reflection light of light path splitter 5 is incident to photoelectric conversion element 21 for monitor by focusing optical system 19 for monitor and is converted photoelectrically. Comparator 25 compares the output of a fixed level from reference level signal generation circuit 23 with the output of photoelectric conversion element 21 and generates control signal 25A. This control signal 25A controls correcting circuits 15a and 15b.
JP8861278A 1978-07-20 1978-07-20 Light intensity fluctuation correction device Expired JPS6031250B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8861278A JPS6031250B2 (en) 1978-07-20 1978-07-20 Light intensity fluctuation correction device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8861278A JPS6031250B2 (en) 1978-07-20 1978-07-20 Light intensity fluctuation correction device

Publications (2)

Publication Number Publication Date
JPS5515073A true JPS5515073A (en) 1980-02-01
JPS6031250B2 JPS6031250B2 (en) 1985-07-20

Family

ID=13947624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8861278A Expired JPS6031250B2 (en) 1978-07-20 1978-07-20 Light intensity fluctuation correction device

Country Status (1)

Country Link
JP (1) JPS6031250B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5784461U (en) * 1980-11-12 1982-05-25
JPS5835408A (en) * 1981-08-28 1983-03-02 Dainippon Printing Co Ltd Signal processor for checking pattern defect
EP0075222A1 (en) * 1981-09-17 1983-03-30 Horiba, Ltd. Method and compensation circuit for analyzers
JPS62243337A (en) * 1986-04-15 1987-10-23 Nec Kyushu Ltd Contaminant detector for semiconductor substrate
KR100499864B1 (en) * 1997-06-12 2005-09-30 칼 짜이스 에스엠테 아게 Photometric device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5784461U (en) * 1980-11-12 1982-05-25
JPS5835408A (en) * 1981-08-28 1983-03-02 Dainippon Printing Co Ltd Signal processor for checking pattern defect
EP0075222A1 (en) * 1981-09-17 1983-03-30 Horiba, Ltd. Method and compensation circuit for analyzers
JPS62243337A (en) * 1986-04-15 1987-10-23 Nec Kyushu Ltd Contaminant detector for semiconductor substrate
KR100499864B1 (en) * 1997-06-12 2005-09-30 칼 짜이스 에스엠테 아게 Photometric device

Also Published As

Publication number Publication date
JPS6031250B2 (en) 1985-07-20

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