JPS55155453A - Electric field emission type electron gun - Google Patents

Electric field emission type electron gun

Info

Publication number
JPS55155453A
JPS55155453A JP6306479A JP6306479A JPS55155453A JP S55155453 A JPS55155453 A JP S55155453A JP 6306479 A JP6306479 A JP 6306479A JP 6306479 A JP6306479 A JP 6306479A JP S55155453 A JPS55155453 A JP S55155453A
Authority
JP
Japan
Prior art keywords
emitter
electric field
field emission
electron gun
emission type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6306479A
Other languages
Japanese (ja)
Inventor
Shuichi Saito
Junichi Ooyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP6306479A priority Critical patent/JPS55155453A/en
Publication of JPS55155453A publication Critical patent/JPS55155453A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To prevent the damage of the emitter in the decreasing region of the emitted current, by enabling the protection device to operate by only a rapid change without regard to the DC components of all the emitted current. CONSTITUTION:The voltage signal corresponding to all the emitted current from a detecting resistor 5 is differentiated by a differentiating circuit 9. The output signal of the differentiating circuit 9 is compared to the reference voltage of a reference power supply unit 1 by a comparator 10. When it exceeds to the reference voltage, a pulse signal generates and it controls a high voltage switching circuit 8. A emitter flushing circuit 12 heats up the emitter to high temperature by manual operation.
JP6306479A 1979-05-22 1979-05-22 Electric field emission type electron gun Pending JPS55155453A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6306479A JPS55155453A (en) 1979-05-22 1979-05-22 Electric field emission type electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6306479A JPS55155453A (en) 1979-05-22 1979-05-22 Electric field emission type electron gun

Publications (1)

Publication Number Publication Date
JPS55155453A true JPS55155453A (en) 1980-12-03

Family

ID=13218530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6306479A Pending JPS55155453A (en) 1979-05-22 1979-05-22 Electric field emission type electron gun

Country Status (1)

Country Link
JP (1) JPS55155453A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58102452A (en) * 1981-12-14 1983-06-18 Jeol Ltd Electron gun of electric-field discharging type
JPS61206200A (en) * 1985-03-08 1986-09-12 日新ハイボルテ−ジ株式会社 Discharge detection circuit for charged particle accelerator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58102452A (en) * 1981-12-14 1983-06-18 Jeol Ltd Electron gun of electric-field discharging type
JPS61206200A (en) * 1985-03-08 1986-09-12 日新ハイボルテ−ジ株式会社 Discharge detection circuit for charged particle accelerator

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