JPS5515620A - Washing method - Google Patents

Washing method

Info

Publication number
JPS5515620A
JPS5515620A JP8767478A JP8767478A JPS5515620A JP S5515620 A JPS5515620 A JP S5515620A JP 8767478 A JP8767478 A JP 8767478A JP 8767478 A JP8767478 A JP 8767478A JP S5515620 A JPS5515620 A JP S5515620A
Authority
JP
Japan
Prior art keywords
washing method
washing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8767478A
Other languages
Japanese (ja)
Other versions
JPS6210014B2 (en
Inventor
Kenji Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8767478A priority Critical patent/JPS5515620A/en
Publication of JPS5515620A publication Critical patent/JPS5515620A/en
Publication of JPS6210014B2 publication Critical patent/JPS6210014B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP8767478A 1978-07-20 1978-07-20 Washing method Granted JPS5515620A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8767478A JPS5515620A (en) 1978-07-20 1978-07-20 Washing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8767478A JPS5515620A (en) 1978-07-20 1978-07-20 Washing method

Publications (2)

Publication Number Publication Date
JPS5515620A true JPS5515620A (en) 1980-02-02
JPS6210014B2 JPS6210014B2 (en) 1987-03-04

Family

ID=13921483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8767478A Granted JPS5515620A (en) 1978-07-20 1978-07-20 Washing method

Country Status (1)

Country Link
JP (1) JPS5515620A (en)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5877161A (en) * 1981-10-15 1983-05-10 エク−セル−オ−・コ−ポレ−シヨン Device for trimming flow for fuel distributing valve
JPS58117355A (en) * 1981-12-24 1983-07-12 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Fuel injector for directly injecting fuel in internal combustion engine
JPS5970784U (en) * 1982-11-05 1984-05-14 春日電機株式会社 Cleaning device for thin plate-shaped traveling bodies
JPS608468U (en) * 1983-06-29 1985-01-21 日野自動車株式会社 fuel injector
JPS608466U (en) * 1983-06-29 1985-01-21 三菱自動車工業株式会社 Diesel engine fuel injection system
JPS6292642U (en) * 1985-11-29 1987-06-13
JPS6396925A (en) * 1986-10-14 1988-04-27 Ulvac Corp Apparatus for cleaning wafer
JPS6443352U (en) * 1987-09-11 1989-03-15
JPH0195522A (en) * 1987-10-08 1989-04-13 Puretetsuku:Kk Dryer
JPH01114974U (en) * 1988-01-29 1989-08-02
JPH0580573U (en) * 1992-04-13 1993-11-02 株式会社伸興 Panel dust remover
US5531857A (en) * 1988-07-08 1996-07-02 Cauldron Limited Partnership Removal of surface contaminants by irradiation from a high energy source
US5821175A (en) * 1988-07-08 1998-10-13 Cauldron Limited Partnership Removal of surface contaminants by irradiation using various methods to achieve desired inert gas flow over treated surface
JP2007311691A (en) * 2006-05-22 2007-11-29 Tokyo Electron Ltd Processing system, transfer arm cleaning method and recording medium
US7306680B2 (en) 2002-09-12 2007-12-11 Asml Netherlands B.V. Method of cleaning by removing particles from surfaces, a cleaning apparatus and a lithographic projection apparatus
US7522263B2 (en) 2005-12-27 2009-04-21 Asml Netherlands B.V. Lithographic apparatus and method
WO2011111139A1 (en) * 2010-03-08 2011-09-15 シャープ株式会社 Cleaning instrument, and instrument having polarizing plate attached thereto
JP2012211951A (en) * 2011-03-30 2012-11-01 Shin Etsu Chem Co Ltd Method and apparatus for cleaning photomask related substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4736717U (en) * 1971-05-06 1972-12-23
JPS4913657A (en) * 1972-05-19 1974-02-06
JPS5339660A (en) * 1976-09-24 1978-04-11 Hitachi Ltd Dust removing device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4736717U (en) * 1971-05-06 1972-12-23
JPS4913657A (en) * 1972-05-19 1974-02-06
JPS5339660A (en) * 1976-09-24 1978-04-11 Hitachi Ltd Dust removing device

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5877161A (en) * 1981-10-15 1983-05-10 エク−セル−オ−・コ−ポレ−シヨン Device for trimming flow for fuel distributing valve
JPS58117355A (en) * 1981-12-24 1983-07-12 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Fuel injector for directly injecting fuel in internal combustion engine
JPS5970784U (en) * 1982-11-05 1984-05-14 春日電機株式会社 Cleaning device for thin plate-shaped traveling bodies
JPS608468U (en) * 1983-06-29 1985-01-21 日野自動車株式会社 fuel injector
JPS608466U (en) * 1983-06-29 1985-01-21 三菱自動車工業株式会社 Diesel engine fuel injection system
JPS6292642U (en) * 1985-11-29 1987-06-13
JPS6396925A (en) * 1986-10-14 1988-04-27 Ulvac Corp Apparatus for cleaning wafer
JPS6443352U (en) * 1987-09-11 1989-03-15
JPH0195522A (en) * 1987-10-08 1989-04-13 Puretetsuku:Kk Dryer
JPH01114974U (en) * 1988-01-29 1989-08-02
US5531857A (en) * 1988-07-08 1996-07-02 Cauldron Limited Partnership Removal of surface contaminants by irradiation from a high energy source
US5821175A (en) * 1988-07-08 1998-10-13 Cauldron Limited Partnership Removal of surface contaminants by irradiation using various methods to achieve desired inert gas flow over treated surface
JPH0580573U (en) * 1992-04-13 1993-11-02 株式会社伸興 Panel dust remover
US7306680B2 (en) 2002-09-12 2007-12-11 Asml Netherlands B.V. Method of cleaning by removing particles from surfaces, a cleaning apparatus and a lithographic projection apparatus
US7522263B2 (en) 2005-12-27 2009-04-21 Asml Netherlands B.V. Lithographic apparatus and method
US8064038B2 (en) 2005-12-27 2011-11-22 Asml Netherlands B.V. Inspection apparatus, lithographic system provided with the inspection apparatus and a method for inspecting a sample
JP2007311691A (en) * 2006-05-22 2007-11-29 Tokyo Electron Ltd Processing system, transfer arm cleaning method and recording medium
WO2011111139A1 (en) * 2010-03-08 2011-09-15 シャープ株式会社 Cleaning instrument, and instrument having polarizing plate attached thereto
JP2012211951A (en) * 2011-03-30 2012-11-01 Shin Etsu Chem Co Ltd Method and apparatus for cleaning photomask related substrate

Also Published As

Publication number Publication date
JPS6210014B2 (en) 1987-03-04

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