JPS5521169A - Bipolar integrated circuit - Google Patents
Bipolar integrated circuitInfo
- Publication number
- JPS5521169A JPS5521169A JP9433778A JP9433778A JPS5521169A JP S5521169 A JPS5521169 A JP S5521169A JP 9433778 A JP9433778 A JP 9433778A JP 9433778 A JP9433778 A JP 9433778A JP S5521169 A JPS5521169 A JP S5521169A
- Authority
- JP
- Japan
- Prior art keywords
- layer wiring
- region
- melting point
- silicide
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To raise a transmission speed of a signal on a first layer wiring by making up the first layer wiring having one portion connected to a semiconductor substrate of a silicide having a high melting point.
CONSTITUTION: On a silicon oxidization film 8, is provided a first layer wiring 10... comprising a high melting point silicide for example, MoSi2, formed by a spattering vaporation or a patterning processing and connected to a collector region 5, base region 6 and emitter region 7 respectively. One of the first layer wiring 10... is connected to a collector region 5 of one of semiconductor elements adjacent to another and sectioned by a P+ separation region 4 and a base region 6 of other semiconductor element respectively. A specific resistance on the first layer wiring 10... can be less reduced and because a thickness is also reduced, a high speed operation can be established.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9433778A JPS5521169A (en) | 1978-08-02 | 1978-08-02 | Bipolar integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9433778A JPS5521169A (en) | 1978-08-02 | 1978-08-02 | Bipolar integrated circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5521169A true JPS5521169A (en) | 1980-02-15 |
Family
ID=14107462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9433778A Pending JPS5521169A (en) | 1978-08-02 | 1978-08-02 | Bipolar integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5521169A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59107555A (en) * | 1982-12-03 | 1984-06-21 | Fujitsu Ltd | Semiconductor device |
-
1978
- 1978-08-02 JP JP9433778A patent/JPS5521169A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59107555A (en) * | 1982-12-03 | 1984-06-21 | Fujitsu Ltd | Semiconductor device |
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