JPS5524497A - Mos fifld effect transistor and method of manufacturing same - Google Patents

Mos fifld effect transistor and method of manufacturing same

Info

Publication number
JPS5524497A
JPS5524497A JP10116579A JP10116579A JPS5524497A JP S5524497 A JPS5524497 A JP S5524497A JP 10116579 A JP10116579 A JP 10116579A JP 10116579 A JP10116579 A JP 10116579A JP S5524497 A JPS5524497 A JP S5524497A
Authority
JP
Japan
Prior art keywords
fifld
mos
effect transistor
manufacturing same
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10116579A
Other languages
Japanese (ja)
Inventor
Kurantsua Deitomaaru
Ponpaa Mihiaeru
Waitoritsuhi Rainaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of JPS5524497A publication Critical patent/JPS5524497A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/149Source or drain regions of field-effect devices
    • H10D62/151Source or drain regions of field-effect devices of IGFETs 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/601Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H10D30/603Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs  having asymmetry in the channel direction, e.g. lateral high-voltage MISFETs having drain offset region or extended drain IGFETs [EDMOS]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6704Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6713Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
    • H10D30/6715Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6704Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6713Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
    • H10D30/6715Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions
    • H10D30/6717Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions the source and the drain regions being asymmetrical
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00Ion implantation into wafers, substrates or parts of devices
    • H10P30/20Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • H10P30/22Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping using masks

Landscapes

  • Thin Film Transistor (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP10116579A 1978-08-08 1979-08-08 Mos fifld effect transistor and method of manufacturing same Pending JPS5524497A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19782834724 DE2834724A1 (en) 1978-08-08 1978-08-08 MOS FIELD EFFECT TRANSISTORS FOR HIGHER VOLTAGES

Publications (1)

Publication Number Publication Date
JPS5524497A true JPS5524497A (en) 1980-02-21

Family

ID=6046501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10116579A Pending JPS5524497A (en) 1978-08-08 1979-08-08 Mos fifld effect transistor and method of manufacturing same

Country Status (4)

Country Link
JP (1) JPS5524497A (en)
DE (1) DE2834724A1 (en)
FR (1) FR2433240A1 (en)
GB (1) GB2027992B (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2150348A (en) * 1983-11-29 1985-06-26 Philips Electronic Associated Insulated-gate field-effect transistors and their manufacture
JPH0612822B2 (en) * 1984-07-27 1994-02-16 株式会社日立製作所 Semiconductor device
US4680603A (en) * 1985-04-12 1987-07-14 General Electric Company Graded extended drain concept for reduced hot electron effect
EP0197501A3 (en) * 1985-04-12 1986-12-17 General Electric Company Extended drain concept for reduced hot electron effect
US4613882A (en) * 1985-04-12 1986-09-23 General Electric Company Hybrid extended drain concept for reduced hot electron effect
JPS62128175A (en) * 1985-11-29 1987-06-10 Hitachi Ltd semiconductor equipment
US5850093A (en) * 1989-11-20 1998-12-15 Tarng; Huang Chang Uni-directional flash device
JP2812093B2 (en) * 1992-09-17 1998-10-15 株式会社日立製作所 Semiconductor device having planar junction
JPH06232170A (en) * 1993-01-29 1994-08-19 Mitsubishi Electric Corp Field effect transistor and its manufacture
GB2282262B (en) * 1993-01-29 1997-04-23 Mitsubishi Electric Corp Field effect transistor and method for producing the field effect transistor
US5401982A (en) * 1994-03-03 1995-03-28 Xerox Corporation Reducing leakage current in a thin-film transistor with charge carrier densities that vary in two dimensions
JP2018125518A (en) * 2017-02-03 2018-08-09 ソニーセミコンダクタソリューションズ株式会社 Transistor, manufacturing method
CN114823860B (en) * 2021-01-27 2025-11-18 苏州大学 Field-effect transistor devices and methods to improve their short-channel effect and output characteristics

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636585B2 (en) * 1973-07-02 1981-08-25
FR2284983A1 (en) * 1974-09-13 1976-04-09 Commissariat Energie Atomique MOS transistor - with smoothly changing impurities concn from drain to substrate by electric field strength manipulation
JPS52156576A (en) * 1976-06-23 1977-12-27 Hitachi Ltd Production of mis semiconductor device
JPS5368581A (en) * 1976-12-01 1978-06-19 Hitachi Ltd Semiconductor device

Also Published As

Publication number Publication date
DE2834724A1 (en) 1980-02-14
GB2027992B (en) 1982-10-06
GB2027992A (en) 1980-02-27
FR2433240A1 (en) 1980-03-07

Similar Documents

Publication Publication Date Title
JPS56160074A (en) Method of manufacturing mos field effect transistor device
JPS54110789A (en) Short channel mis field effect transistor and method of fabricating same
JPS55108752A (en) Semiconductor device and method of fabricating same
JPS55107268A (en) Method of fabricating mos for forming source and drain regions in substrate
JPS551194A (en) Method of manufacturing mos semiconductor
JPS5617074A (en) Field effect transistor and method of manufacturing same
JPS57160172A (en) Planar field effect transistor and method of producing same
JPS54158190A (en) Semiconductor device and method of fabricating same
JPS5613773A (en) Fet and method of manufacturing same
JPS54152872A (en) Metal semiconductor fet transistor and method of fabricating same
JPS55123159A (en) Method of fabricating mos device
JPS54158882A (en) Method of fabricating field effect transistor
JPS5534500A (en) Integrated mos semiconductor memory and method of manufacturing same
JPS5524497A (en) Mos fifld effect transistor and method of manufacturing same
DE3273866D1 (en) Power mos field effect transistor and method of producing the same
JPS5583269A (en) High voltage field effect transistor and method of fabricating same
AU536540B2 (en) Insulated-gate field-effect transistor and method of of manufacturing same
JPS55154771A (en) Method of forming field effect transistor
JPS54148487A (en) Method of fabricating metallic semiconductor field effect transistor
JPS5546596A (en) Field effect transistor and method of fabricating same
JPS5724568A (en) Mos transistor formed all by implantation and method of producing same
JPS54136281A (en) Semiconductor device and method of fabricating same
JPS54121685A (en) Ic and method of fabricating same
JPS55105373A (en) Metal oxide semiconductor transistor and method of fabricating same
JPS54162977A (en) Memory fet transistor and method of fabricating same