JPS5524497A - Mos fifld effect transistor and method of manufacturing same - Google Patents
Mos fifld effect transistor and method of manufacturing sameInfo
- Publication number
- JPS5524497A JPS5524497A JP10116579A JP10116579A JPS5524497A JP S5524497 A JPS5524497 A JP S5524497A JP 10116579 A JP10116579 A JP 10116579A JP 10116579 A JP10116579 A JP 10116579A JP S5524497 A JPS5524497 A JP S5524497A
- Authority
- JP
- Japan
- Prior art keywords
- fifld
- mos
- effect transistor
- manufacturing same
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
- H10D62/149—Source or drain regions of field-effect devices
- H10D62/151—Source or drain regions of field-effect devices of IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs
- H10D30/603—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs having asymmetry in the channel direction, e.g. lateral high-voltage MISFETs having drain offset region or extended drain IGFETs [EDMOS]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
- H10D30/6715—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
- H10D30/6715—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions
- H10D30/6717—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions the source and the drain regions being asymmetrical
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
- H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P30/00—Ion implantation into wafers, substrates or parts of devices
- H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
- H10P30/22—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping using masks
Landscapes
- Thin Film Transistor (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19782834724 DE2834724A1 (en) | 1978-08-08 | 1978-08-08 | MOS FIELD EFFECT TRANSISTORS FOR HIGHER VOLTAGES |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5524497A true JPS5524497A (en) | 1980-02-21 |
Family
ID=6046501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10116579A Pending JPS5524497A (en) | 1978-08-08 | 1979-08-08 | Mos fifld effect transistor and method of manufacturing same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5524497A (en) |
| DE (1) | DE2834724A1 (en) |
| FR (1) | FR2433240A1 (en) |
| GB (1) | GB2027992B (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2150348A (en) * | 1983-11-29 | 1985-06-26 | Philips Electronic Associated | Insulated-gate field-effect transistors and their manufacture |
| JPH0612822B2 (en) * | 1984-07-27 | 1994-02-16 | 株式会社日立製作所 | Semiconductor device |
| US4680603A (en) * | 1985-04-12 | 1987-07-14 | General Electric Company | Graded extended drain concept for reduced hot electron effect |
| EP0197501A3 (en) * | 1985-04-12 | 1986-12-17 | General Electric Company | Extended drain concept for reduced hot electron effect |
| US4613882A (en) * | 1985-04-12 | 1986-09-23 | General Electric Company | Hybrid extended drain concept for reduced hot electron effect |
| JPS62128175A (en) * | 1985-11-29 | 1987-06-10 | Hitachi Ltd | semiconductor equipment |
| US5850093A (en) * | 1989-11-20 | 1998-12-15 | Tarng; Huang Chang | Uni-directional flash device |
| JP2812093B2 (en) * | 1992-09-17 | 1998-10-15 | 株式会社日立製作所 | Semiconductor device having planar junction |
| JPH06232170A (en) * | 1993-01-29 | 1994-08-19 | Mitsubishi Electric Corp | Field effect transistor and its manufacture |
| GB2282262B (en) * | 1993-01-29 | 1997-04-23 | Mitsubishi Electric Corp | Field effect transistor and method for producing the field effect transistor |
| US5401982A (en) * | 1994-03-03 | 1995-03-28 | Xerox Corporation | Reducing leakage current in a thin-film transistor with charge carrier densities that vary in two dimensions |
| JP2018125518A (en) * | 2017-02-03 | 2018-08-09 | ソニーセミコンダクタソリューションズ株式会社 | Transistor, manufacturing method |
| CN114823860B (en) * | 2021-01-27 | 2025-11-18 | 苏州大学 | Field-effect transistor devices and methods to improve their short-channel effect and output characteristics |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5636585B2 (en) * | 1973-07-02 | 1981-08-25 | ||
| FR2284983A1 (en) * | 1974-09-13 | 1976-04-09 | Commissariat Energie Atomique | MOS transistor - with smoothly changing impurities concn from drain to substrate by electric field strength manipulation |
| JPS52156576A (en) * | 1976-06-23 | 1977-12-27 | Hitachi Ltd | Production of mis semiconductor device |
| JPS5368581A (en) * | 1976-12-01 | 1978-06-19 | Hitachi Ltd | Semiconductor device |
-
1978
- 1978-08-08 DE DE19782834724 patent/DE2834724A1/en not_active Withdrawn
-
1979
- 1979-08-07 GB GB7927555A patent/GB2027992B/en not_active Expired
- 1979-08-07 FR FR7920191A patent/FR2433240A1/en not_active Withdrawn
- 1979-08-08 JP JP10116579A patent/JPS5524497A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2834724A1 (en) | 1980-02-14 |
| GB2027992B (en) | 1982-10-06 |
| GB2027992A (en) | 1980-02-27 |
| FR2433240A1 (en) | 1980-03-07 |
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