JPS5525398A - Nozzle device for connecting electron beam gun to surface of print plate - Google Patents

Nozzle device for connecting electron beam gun to surface of print plate

Info

Publication number
JPS5525398A
JPS5525398A JP9876779A JP9876779A JPS5525398A JP S5525398 A JPS5525398 A JP S5525398A JP 9876779 A JP9876779 A JP 9876779A JP 9876779 A JP9876779 A JP 9876779A JP S5525398 A JPS5525398 A JP S5525398A
Authority
JP
Japan
Prior art keywords
electron beam
nozzle device
beam gun
print plate
connecting electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9876779A
Other languages
English (en)
Japanese (ja)
Inventor
Baisubuengaa Jiikufuriido
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Ing Rudolf Hell GmbH
Original Assignee
Dr Ing Rudolf Hell GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Ing Rudolf Hell GmbH filed Critical Dr Ing Rudolf Hell GmbH
Publication of JPS5525398A publication Critical patent/JPS5525398A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301—Arrangements enabling beams to pass between regions of different pressure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Electron Beam Exposure (AREA)
JP9876779A 1978-08-05 1979-08-03 Nozzle device for connecting electron beam gun to surface of print plate Pending JPS5525398A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19782834458 DE2834458A1 (de) 1978-08-05 1978-08-05 Mundstueck zur ankopplung einer elektronenstrahlkanone an druckformoberflaechen

Publications (1)

Publication Number Publication Date
JPS5525398A true JPS5525398A (en) 1980-02-23

Family

ID=6046359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9876779A Pending JPS5525398A (en) 1978-08-05 1979-08-03 Nozzle device for connecting electron beam gun to surface of print plate

Country Status (9)

Country Link
JP (1) JPS5525398A (de)
BR (1) BR7904493A (de)
DD (1) DD145245A5 (de)
DE (1) DE2834458A1 (de)
FR (1) FR2432386A1 (de)
GB (1) GB2027271A (de)
IT (1) IT1162558B (de)
NL (1) NL7905135A (de)
SU (1) SU849991A3 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2947444C2 (de) * 1979-11-24 1983-12-08 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Elektronenstrahl-Gravierverfahren
US4528451A (en) * 1982-10-19 1985-07-09 Varian Associates, Inc. Gap control system for localized vacuum processing
US4607167A (en) * 1982-10-19 1986-08-19 Varian Associates, Inc. Charged particle beam lithography machine incorporating localized vacuum envelope
US4584479A (en) * 1982-10-19 1986-04-22 Varian Associates, Inc. Envelope apparatus for localized vacuum processing
US4560880A (en) * 1983-09-19 1985-12-24 Varian Associates, Inc. Apparatus for positioning a workpiece in a localized vacuum processing system
US4524261A (en) * 1983-09-19 1985-06-18 Varian Associates, Inc. Localized vacuum processing apparatus

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1480912A (fr) * 1966-05-24 1967-05-12 Inst Polygraphische Maschinen Procédé et dispositif pour la fabrication de formes d'imprimerie
DE2152100A1 (de) * 1971-10-19 1973-04-26 Vickers Ltd Kaskadenpumpenanordnung
DE2207090A1 (de) * 1972-02-15 1973-09-06 Hell Rudolf Dr Ing Gmbh Graviersystem zur herstellung gerasterter druckformen

Also Published As

Publication number Publication date
GB2027271A (en) 1980-02-13
IT1162558B (it) 1987-04-01
DE2834458A1 (de) 1980-02-14
IT7924183A0 (it) 1979-07-09
SU849991A3 (ru) 1981-07-23
DD145245A5 (de) 1980-12-03
BR7904493A (pt) 1980-07-22
FR2432386A1 (fr) 1980-02-29
NL7905135A (nl) 1980-02-07

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