JPS5527119U - - Google Patents
Info
- Publication number
- JPS5527119U JPS5527119U JP10998578U JP10998578U JPS5527119U JP S5527119 U JPS5527119 U JP S5527119U JP 10998578 U JP10998578 U JP 10998578U JP 10998578 U JP10998578 U JP 10998578U JP S5527119 U JPS5527119 U JP S5527119U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978109985U JPS5746650Y2 (it) | 1978-08-10 | 1978-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978109985U JPS5746650Y2 (it) | 1978-08-10 | 1978-08-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5527119U true JPS5527119U (it) | 1980-02-21 |
| JPS5746650Y2 JPS5746650Y2 (it) | 1982-10-14 |
Family
ID=29056442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978109985U Expired JPS5746650Y2 (it) | 1978-08-10 | 1978-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5746650Y2 (it) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0752718B2 (ja) | 1984-11-26 | 1995-06-05 | 株式会社半導体エネルギー研究所 | 薄膜形成方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5253095U (it) * | 1975-10-13 | 1977-04-15 |
-
1978
- 1978-08-10 JP JP1978109985U patent/JPS5746650Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5253095U (it) * | 1975-10-13 | 1977-04-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5746650Y2 (it) | 1982-10-14 |