JPS5529708A - Contactless film thickness measuring unit - Google Patents

Contactless film thickness measuring unit

Info

Publication number
JPS5529708A
JPS5529708A JP10145378A JP10145378A JPS5529708A JP S5529708 A JPS5529708 A JP S5529708A JP 10145378 A JP10145378 A JP 10145378A JP 10145378 A JP10145378 A JP 10145378A JP S5529708 A JPS5529708 A JP S5529708A
Authority
JP
Japan
Prior art keywords
light
film thickness
reflected
light flux
reaches
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10145378A
Other languages
Japanese (ja)
Inventor
Hiroshi Isaka
Eitaro Kubo
Osamu Yoshizaki
Hitoshi Hosoya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP10145378A priority Critical patent/JPS5529708A/en
Publication of JPS5529708A publication Critical patent/JPS5529708A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To perform an on-line measurement of each film thickness of a multilayer transmission material continuously without contact by using a Michelson interference meter utilizing a white light.
CONSTITUTION: The light from light source 1 becomes a parallel light and reaches beam splitter 3 and is divided into light fluxes R1 and R2. Light flux R1 is incident onto sample 4 and is reflected by fixed mirror 6 and reaches detector 11. At this time, since light flux R1 is reflected for every film layer face of measured sample 4, the light incident onto detector 11 becomes composite light fluxes defferent in phase. The other divided light flux R2 is reflected by movable mirror 7 and reaches detector 11 through beam splitter 3. Movable mirror 7 is positioned by differential transformer 10 and is driven by speaker 9 while being prevented from transversal vibration by air bearing 8. Then, since a light path difference is generated in light flux R2, the film thickness of each layer can be detected by measuring the interference geterated between light fluxes R1 and R2.
COPYRIGHT: (C)1980,JPO&Japio
JP10145378A 1978-08-22 1978-08-22 Contactless film thickness measuring unit Pending JPS5529708A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10145378A JPS5529708A (en) 1978-08-22 1978-08-22 Contactless film thickness measuring unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10145378A JPS5529708A (en) 1978-08-22 1978-08-22 Contactless film thickness measuring unit

Publications (1)

Publication Number Publication Date
JPS5529708A true JPS5529708A (en) 1980-03-03

Family

ID=14301106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10145378A Pending JPS5529708A (en) 1978-08-22 1978-08-22 Contactless film thickness measuring unit

Country Status (1)

Country Link
JP (1) JPS5529708A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5220405A (en) * 1991-12-20 1993-06-15 International Business Machines Corporation Interferometer for in situ measurement of thin film thickness changes
CN111336932A (en) * 2018-12-18 2020-06-26 天津大学 Microscopic differential reflection spectrum measuring system and method for measuring thickness of nano film

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010509A (en) * 1973-05-24 1975-02-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010509A (en) * 1973-05-24 1975-02-03

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5220405A (en) * 1991-12-20 1993-06-15 International Business Machines Corporation Interferometer for in situ measurement of thin film thickness changes
CN111336932A (en) * 2018-12-18 2020-06-26 天津大学 Microscopic differential reflection spectrum measuring system and method for measuring thickness of nano film

Similar Documents

Publication Publication Date Title
EP0124224A3 (en) Method and apparatus for thin film thickness measurement
ES482034A1 (en) Method and apparatus for correcting the error of a position measuring interferometer
US5610716A (en) Method and apparatus for measuring film thickness utilizing the slope of the phase of the Fourier transform of an autocorrelator signal
SE8702244L (en) SET AND DEVICE FOR CONTINUOUS Saturation of voltage in a plane film and specially in a paper web
JPH1151619A (en) Thickness measuring instrument
WO2002042754A3 (en) Measurement of surface defects
JPS5529708A (en) Contactless film thickness measuring unit
GB1392395A (en) Stabilization of optical path length differences
AU524858B2 (en) Radiation measurement of web thickness
JPS55155204A (en) Measuring instrument for thickness of film
JPS5763408A (en) Flatness detector
RU2035721C1 (en) Method of checking transparency of flat light-translucent materials
JPS5733306A (en) Surface roughness measuring device
JPS5593003A (en) Measuring method for plate thickness of plate-shape transparent body
JPS62124405A (en) Thermal dilatometer
JPS5724863A (en) Modulation measuring method of and apparatus for intensity of light
FR2455271A1 (en) Measuring leakage from pressurised container - is determined by calculator from change in refractive index of contents
JPS5653423A (en) Measuring method for propagation speed of ultrasonic wave
Tanaka et al. Laser heterodyne measurements of photo-induced refractive-index changes in amorphous As-S films
JPS6473254A (en) Measuring apparatus for fast moving object
JPS5381151A (en) Surface film thickness detector
JPS56153208A (en) Measuring device for extent of thickness change of painted layer
SU725500A1 (en) Device for measuring geometric parameters of objects
JPS5497469A (en) Laser speed measuring apparatus
JPS5714744A (en) Apparatus for measuring differential fluorescence