JPS5532386A - Electrode inspecting device - Google Patents

Electrode inspecting device

Info

Publication number
JPS5532386A
JPS5532386A JP10664578A JP10664578A JPS5532386A JP S5532386 A JPS5532386 A JP S5532386A JP 10664578 A JP10664578 A JP 10664578A JP 10664578 A JP10664578 A JP 10664578A JP S5532386 A JPS5532386 A JP S5532386A
Authority
JP
Japan
Prior art keywords
microelectrode
unit
sensor
polarized
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10664578A
Other languages
Japanese (ja)
Inventor
Masaaki Nakamura
Tadatami Mori
Isao Tofuku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10664578A priority Critical patent/JPS5532386A/en
Publication of JPS5532386A publication Critical patent/JPS5532386A/en
Pending legal-status Critical Current

Links

Landscapes

  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

PURPOSE: To improve the efficiency and reliability of electrode inspection by displaying a magnified image of a microelectrode placed on a table which is movable in a plane by detecting the light which is radiated from behind and transmitted through the microelectrode with a solid image pickup sensor.
CONSTITUTION: The device comprises a control unit 1 for totally controlling the system, a mechanical unit 2 driven by the control unit 1, a sensor unit 3 and a displaying unit 4. The mechanical unit 2 comprises a scanning table 21 which is movable in the X-X and Y-Y directions in a horizontal plane of the scanning table and adapted to carry a microelectrode for inspection, a illuminating light source 22, a polarizing mirrors 23 and 27, a lens 26 and a solid image pickup sensor 28. The table 21 is operated in the X-X and Y-Y directions by pulse motors 24 and 25. The light from the light source 22 is polarized by the mirror 23, transmitted through a microelectrode to be inspected, then magnified and polarized by the lens 26 and the mirror 27, respectively, and detected by the sensor 28. When any flaw is found, a signal is sent to a display device 45 and a printer 46.
COPYRIGHT: (C)1980,JPO&Japio
JP10664578A 1978-08-30 1978-08-30 Electrode inspecting device Pending JPS5532386A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10664578A JPS5532386A (en) 1978-08-30 1978-08-30 Electrode inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10664578A JPS5532386A (en) 1978-08-30 1978-08-30 Electrode inspecting device

Publications (1)

Publication Number Publication Date
JPS5532386A true JPS5532386A (en) 1980-03-07

Family

ID=14438851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10664578A Pending JPS5532386A (en) 1978-08-30 1978-08-30 Electrode inspecting device

Country Status (1)

Country Link
JP (1) JPS5532386A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0251562U (en) * 1988-10-05 1990-04-11
JPH0336654U (en) * 1989-08-16 1991-04-10

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0251562U (en) * 1988-10-05 1990-04-11
JPH0336654U (en) * 1989-08-16 1991-04-10

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