JPS5533027A - Substrate conveyor - Google Patents

Substrate conveyor

Info

Publication number
JPS5533027A
JPS5533027A JP10482678A JP10482678A JPS5533027A JP S5533027 A JPS5533027 A JP S5533027A JP 10482678 A JP10482678 A JP 10482678A JP 10482678 A JP10482678 A JP 10482678A JP S5533027 A JPS5533027 A JP S5533027A
Authority
JP
Japan
Prior art keywords
claws
frames
wafer
grooves
blocks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10482678A
Other languages
Japanese (ja)
Other versions
JPS622457B2 (en
Inventor
Daijiro Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10482678A priority Critical patent/JPS5533027A/en
Publication of JPS5533027A publication Critical patent/JPS5533027A/en
Publication of JPS622457B2 publication Critical patent/JPS622457B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To raise the efficiency of transfer work of a semiconductor wafer and reduce handling labor, by nipping the wafer at its edges with claws which have grooves and by operating frames coupled to the claws to release the wafer.
CONSTITUTION: The plural claws 5 having the grooves 6 for holding the semiconductor wafer 1 are attached to blocks 8 through arms 7 so that the claws face each other. The blocks 8 are slidably coupled to the movable frames 10, 10' through guide shafts 9, 9'. The frames 10, 10' are attached to a fixed frame 12 by pins 11, 11'. A push plate 13, which is moved up and down by a screw shaft 15, is provided on the facing ends of the movable frames 10, 10'. When the push plate 13 is moved down by rotating the screw shaft 15, the frames 10, 10' are opended from each other. At that time, the wafer 1 is released from the claws 5 and drops down into a container 23.
COPYRIGHT: (C)1980,JPO&Japio
JP10482678A 1978-08-30 1978-08-30 Substrate conveyor Granted JPS5533027A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10482678A JPS5533027A (en) 1978-08-30 1978-08-30 Substrate conveyor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10482678A JPS5533027A (en) 1978-08-30 1978-08-30 Substrate conveyor

Publications (2)

Publication Number Publication Date
JPS5533027A true JPS5533027A (en) 1980-03-08
JPS622457B2 JPS622457B2 (en) 1987-01-20

Family

ID=14391186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10482678A Granted JPS5533027A (en) 1978-08-30 1978-08-30 Substrate conveyor

Country Status (1)

Country Link
JP (1) JPS5533027A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02276261A (en) * 1989-04-18 1990-11-13 Kokusai Electric Co Ltd Semiconductor wafer transfer device
US5423503A (en) * 1990-10-31 1995-06-13 Tokyo Electron Sagami Limited Plate-like member conveying apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0589047U (en) * 1992-05-12 1993-12-03 関東自動車工業株式会社 Door lock device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5299771U (en) * 1976-01-23 1977-07-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5299771U (en) * 1976-01-23 1977-07-28

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02276261A (en) * 1989-04-18 1990-11-13 Kokusai Electric Co Ltd Semiconductor wafer transfer device
US5423503A (en) * 1990-10-31 1995-06-13 Tokyo Electron Sagami Limited Plate-like member conveying apparatus

Also Published As

Publication number Publication date
JPS622457B2 (en) 1987-01-20

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