JPS5539111A - Electron beam axis centering device - Google Patents

Electron beam axis centering device

Info

Publication number
JPS5539111A
JPS5539111A JP11152578A JP11152578A JPS5539111A JP S5539111 A JPS5539111 A JP S5539111A JP 11152578 A JP11152578 A JP 11152578A JP 11152578 A JP11152578 A JP 11152578A JP S5539111 A JPS5539111 A JP S5539111A
Authority
JP
Japan
Prior art keywords
electron beam
vane
axis
center
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11152578A
Other languages
English (en)
Other versions
JPS5856947B2 (ja
Inventor
Mamoru Nakasuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP53111525A priority Critical patent/JPS5856947B2/ja
Publication of JPS5539111A publication Critical patent/JPS5539111A/ja
Publication of JPS5856947B2 publication Critical patent/JPS5856947B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
JP53111525A 1978-09-11 1978-09-11 電子ビ−ムの軸合せ装置 Expired JPS5856947B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53111525A JPS5856947B2 (ja) 1978-09-11 1978-09-11 電子ビ−ムの軸合せ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53111525A JPS5856947B2 (ja) 1978-09-11 1978-09-11 電子ビ−ムの軸合せ装置

Publications (2)

Publication Number Publication Date
JPS5539111A true JPS5539111A (en) 1980-03-18
JPS5856947B2 JPS5856947B2 (ja) 1983-12-17

Family

ID=14563533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53111525A Expired JPS5856947B2 (ja) 1978-09-11 1978-09-11 電子ビ−ムの軸合せ装置

Country Status (1)

Country Link
JP (1) JPS5856947B2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5595326A (en) * 1979-01-11 1980-07-19 Nec Corp Electron beam exposure device
JPS57130352A (en) * 1981-02-05 1982-08-12 Akashi Seisakusho Co Ltd Automatic axis alignment device for charged particle beam
JPS59110966U (ja) * 1983-01-17 1984-07-26 富士電気化学株式会社 集合電池
JPH0197353A (ja) * 1987-10-08 1989-04-14 Shimadzu Corp 表面分析計における電子ビーム位置調節装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5595326A (en) * 1979-01-11 1980-07-19 Nec Corp Electron beam exposure device
JPS57130352A (en) * 1981-02-05 1982-08-12 Akashi Seisakusho Co Ltd Automatic axis alignment device for charged particle beam
JPS59110966U (ja) * 1983-01-17 1984-07-26 富士電気化学株式会社 集合電池
JPH0197353A (ja) * 1987-10-08 1989-04-14 Shimadzu Corp 表面分析計における電子ビーム位置調節装置

Also Published As

Publication number Publication date
JPS5856947B2 (ja) 1983-12-17

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